Technical Specification - Varian 969-9059 Serie Mode D'emploi

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TECHNICAL SPECIFICATION

The following figure shows the Turbo-V2000HT pump outline drawing. Dimensions are in inches [mm].
Pumping speed
N
2
He: 2000 l/s
H
2
Compression ratio
N
2
He: 2 x 10
H
2
Base pressure*
Minimum with recommended
mechanical forepump:
1 x 10
Inlet flange
CFF 12" O.D.
ISO 250
Foreline flange
KF 40 NW
Rotational speed
33000 RPM
Start-up time
10 minutes
Recommended
DS 602
forepump
TriScroll 600
Operating position
Any
Cooling requirements
Water
Max rotor temperature
120 fC
Operating ambient
+ 5f C to + 35f C
temperature
: 1950 l/s
: 1500 l/s
9
: >1 x 10
6
5
: 2 x 10
-10
-11
mbar (7.5 x 10
Torr)
Coolant water
Bakeout temperature
Max permissible rotor
temperature
Vibration level (dis-
placement)
Input
Lubricant
Installation category
Pollution degree
Storage temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump.
26
TECHNICAL INFORMATION
minimum flow: 200 l/h (0.89 GPM)
temperature: + 10f C to + 20f C
pressure: 3 to 5 bar (45 to 75 Psi)
120f C max. at CF inlet flange
80f C max. at ISO inlet flange
120 fC
< 0.01 µm at inlet flange
120 Vac, three phase, 550 Hz
permanent lubrication
II
2
- 20f C to + 70f C
ISO 250: 44 (96.8)
CFF 12î: 55 (121)
87-900-969-01

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Ce manuel est également adapté pour:

969-9084 sérieTurbo-v 2000ht

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