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TECHNICAL SPECIFICATION
The following figure shows the Turbo-V 150HT outline drawing. Dimensions are in inches [mm].
Pumping speed
ISO 100:
N
:
130 l/s
2
He:
120 l/s
H
:
110 l/s
2
Compression ratio
N
: 3 x 10
2
He: 8 x 10
H
: 8 x 10
2
Base pressure*
with minimum recommended
mechanical pump:
< 2 x 10
with minimum recommended
diaphragm pump:
2 x 10
Inlet flange
ISO 100, ISO 63, CFF 6", CFF 4.5"
Foreline flange
KF 16 NW
Rotational speed
62000 rpm
Start-up time
< 90 seconds
Recommended
Mechanical: Varian SD 40
forepump
Diaphragm: MD12
Operating ambient
+ 5° C to + 35° C
temperature
ISO 63:
100 l/s
105 l/s
100 l/s
8
5
4
-10
-10
mbar (< 1.5 x 10
Torr)
-8
-8
mbar (1.5 x 10
torr)
Operating position
Cooling
requirements
Coolant water
Bakeout
temperature
Vibration level
(displacement)
Input
Lubricant
Storage
temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump.
26
TECHNICAL INFORMATION
Any
Forced air or water
minimum flow: 30 l/h (0.13 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 4 bar
120° C max. at inlet flange (CF flange)
80° C max. at inlet flange (ISO flange)
< 0.01 µm at inlet flange
120 Vac, three phase, 1050 Hz
permanent lubrication
- 20° C to + 70° C
CFF: 5.6 (12.3)
ISO: 3.6 (7.9)
87-900-891-01(C)
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