Technical Information; Description Of The Turbopump - Varian Turbo-V 150HT Mode D'emploi

DESCRIPTION OF THE TURBOPUMP

The Turbo-V150HT pump is available in four mod-
els. The four models, which differ only in the high
vacuum flange, are:
− Model 969-9369 with ISO 100 high vacuum
flange
− Model 969-9370 with ISO 63 external diameter
high vacuum flange
− Model 969-9371 with ConFlat 6" external di-
ameter high vacuum flange
− Model 969-9372 with ConFlat 4.5" external di-
ameter high vacuum flange.
Model 969-9369
Model 969-9371
The Turbo-V150HT pump consists of a high fre-
quency motor driving a turbine fitted with 7 bladed
stages and 6 Macrotorr stages. The turbine rotates
in an anticlockwise direction when viewed from the
high vacuum flange end.
The turbine is made of high-strength aluminium al-
loy, machined from a single block.
Proceeding from the high vacuum to the for vac-
uum region, the turbine stages sequence is:
Model 969-9370
Model 969-9372
1 stage with a blade angle of 42°, 1 stage with a
blade angle of 28°, 3 stages with a blade angle of
20°, and 3 final stages with a blade angle of 10°.
The Macrotorr stages are in the form of six discs.
The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are made of
stainless steel. These are supported and accu-
rately positioned by spacer rings.
The Macrotorr stators are in the form of self-
positioning machined discs with pumping channels
and an opening restricted by the corresponding ro-
tor discs. These are made of aluminium alloy.
During normal operation, the motor is fed with a
voltage of 120 Vac three-phase at 1050 Hz. To re-
duce losses during start-up to a minimum, the fre-
quency increases according to a ramp with a
higher initial voltage/frequency ratio.
The external body of the pump is shaped so that
the pump can function with natural convection air
cooling. Kits are available for water cooling or
forced air cooling to cool the pump in the cases
where it is used under heavy load or when natural
convection is insufficient for cooling purposes.
A thermistor sensor is mounted near the upper
bearing to prevent the pump from overheating. The
thermistor sensor, the motor stator windings and
the earth are connected to a Turbo-V controller
through a 6 pin socket on the side of the pump.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01 µm.
The pump can operate in any position and can be
supported on the high vacuum flange or on its
base. The connection of the forevacuum on the
side of the pump is a KF 16 NW flange.
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TECHNICAL INFORMATION

87-900-891-01(C)