Technical Information; Description Of The Turbopump - Varian 969-9360 Série Mode D'emploi

Table des Matières

Publicité

DESCRIPTION OF THE TURBOPUMP

The Turbo-V70 pump is available in four versions.
The difference between the two versions lies
purely in the high vacuum connection. The four
versions are:
− Model 969-9357 with ISO 63 high vacuum
flange
− Model 969-9358 with ConFlat 4.5î external di-
ameter high vacuum flange
− Model 969-9359 with KF 40 NW high vacuum
flange
− Model 969-9360 with ConFlat 2.75î external
diameter high vacuum flange
Model 969-9357
Model 969-9359
The Turbo-V70 pump consists of a high frequency
motor driving a turbine fitted with 11 bladed
stages. The turbine rotates in an anticlockwise di-
rection when viewed from the high vacuum flange
end.
Model 969-9358
Model 969-9360
25

TECHNICAL INFORMATION

The turbine is made of high-strength, light alumin-
ium alloy, and is machined from a single block of
aluminium. The turbine blades have five different
angles, from 42° to 12°.
The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are fabricated in
stainless steel. These are supported and accu-
rately positioned by spacer rings.
During normal operation, the motor functions with
a power feed at 54 Vac three-phase at 1250 Hz.
To reduce losses during start-up to a minimum,
the frequency increases according to a ramp with
a higher initial voltage/frequency ratio.
The external body of the pump is fitted with fins
which allow the pump itself to function with natural
convection air cooling. Kits are available for water
cooling or forced air cooling to cool the pump in
the cases where it is used under heavy load or
when natural convection is insufficient for cooling
purposes.
A thermistor sensor is mounted near the upper
bearing to prevent the pump from overheating.
The thermistor sensor, the motor stator windings
and the earth are connected to a Turbo-V control-
ler through a 6 pin socket on the side of the pump.
The pump is balanced after assembly with a re-
sidual vibration amplitude less than 0.01 µm.
The pump can operate in any position and can be
supported on the high vacuum flange or on its
base. The connection of the forevacuum on the
side of the pump is a KF 16 NW flange.
87-900-860-01(E)

Publicité

Table des Matières
loading

Ce manuel est également adapté pour:

969-9359 série969-9358 série969-9357 sérieTurbo-v70Turbo-v70 969-9357 sérieTurbo-v70 969-9358 série ... Afficher tout

Table des Matières