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TECHNICAL SPECIFICATION
Pumping speed (l/s)
With CF 4.5î or
He: 60 l/s
Compression ratio
Base pressure*
1 x 10
Inlet flange
CF 4.5" O.D.
ISO63
CF 2.75" O.D.
KF 40 NW
Foreline flange
KF 16 NW
Rotational speed
75000 RPM
Start-up time
< 60 seconds
Recommended fore-
mechanical: Varian SD-40
pump
3
2 m
/h (1.2 CFM)
Operating position
any
Cooling
Natural air convection
requirements
Forced air or water optional
With CF 2.75î or
ISO 63:
KF 40 NW:
N
: 68 l/s
N
: 45 l/s
2
2
He: 50 l/s
H
: 45 l/s
H
: 41 l/s
2
2
7
N
: 5 x 10
2
3
He: 4 x 10
2
H
: 4 x 10
2
-9
-10
mbar (8 x 10
Torr)
Operating ambient
temperature
Coolant water
Bakeout
temperature
Vibration level
(displacement)
Noise level
Input
Lubricant
Installation category
Pollution degree
Storage temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base pres-
sure is that measured in a leak-free test dome, 48
hours after the completion of test dome bake-out,
with a Turbopump fitted with a ConFlat flange and
using the recommended pre-vacuum pump.
26
TECHNICAL INFORMATION
+ 5o C to + 35o C
flow: 10 l/h (0.05 GPM)
temperature: + 10o C to + 30o C
pressure: 2 to 4 bar (30 to 60 Psi)
120o C at inlet flange max. (CF
flange)
80o C at inlet flange max. (ISO
flange)
< 0.01 µm at inlet flange
45 dB (A) at 1 meter
54 Vac, three phase, 1250 Hz
permanent lubrication
II
2
- 20o C to + 70o C
ISO: 1.6 (6)
CFF: 2.3 (4)
87-900-860-01(E)
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