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TECHNICAL SPECIFICATION
Pumping speed (l/s)
N
: 250 l/s
2
He: 220 l/s
H
: 200 l/s
2
Compression ratio
N
: 2 x 10
2
He: 1 x 10
H
: 1 x 10
2
Base pressure*
with recommended mechanical fore-
pump:
2 x 10
with recommended diaphragm fore
pump:
2 x 10
Inlet flange
DN 100 CFF (6" O.D.)
DN 100 ISO
Foreline flange
NW 16 KF
Rotational speed
56000 RPM
Start-up time
< 3 minutes
Recommended
Two stage rotary pump SD-40
forepump
Diaphragm pump: MDP 30
Operating
any
position
Cooling
Natural air convection
requirements
Forced air or water optional
8
5
4
-10
-10
mbar (1.5 x 10
Torr)
-8
-8
mbar (1.5 x 10
Torr)
Operating ambient
temperature
Coolant water
Bakeout
temperature
Vibration level
(displacement)
Noise level
Input
Lubricant
Storage
temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump.
26
TECHNICAL INFORMATION
UPPER VIEW
BOTTOM VIEW
+ 5° C to + 35° C
flow: 30 l/h (0.13 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 4 bar
120° C at inlet CF flange maximum
80° C with ISO flange
< 0.01 µm at inlet flange
45 dB (A) at 1 meter
58 Vac, three phase, 933 Hz
permanent lubrication
- 20° C to + 70° C
ISO: 7.5 (3.4); CFF: 11.4 (5.2)
87-900-851-01(A)
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