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TYPICAL LAYOUT DIAGRAM
1.
Turbo-V controller
2.
Vent valve / vent device control unit
3.
Vent valve
4.
Vacuum pump shut-off valve (optional)
5.
System vent valve (optional)
6.
Vacuum chamber
7.
Ionization gauge
8.
Fore-vacuum pump connecting flange
9.
Oil mist eliminator
10. Fore-vacuum pump with internal one-way
valve
11. Fore-vacuum pump control relay
12. Connection for water cooling
13. Fore-vacumm line
14. Roughing line with valve (optional)
15. Turbopump
Connection A - HIGH VACUUM FLANGE
To connect the Turbo-V250 pump to the ISO inlet
flange, remove the outer ring and position the cen-
tering ring as shown in the figure.
Then fix the two flanges with the clamps or claws
as shown in the figure.
For ConFlat flange connections we recommend
using Varian hardware.
To facilitate assembly and dismantling, apply Fel-
pro C-100 high temperature lubricant to the screw
threads protruding from the flange and between
the nuts and flange.
Attach the units and tighten each one in turn. Re-
peat the sequential tightening until the flange faces
meet.
Exercise care when tightening nuts and bolts to
avoid creating dents in the envelope as this may
cause the pump rotor to lock.
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TECHNICAL INFORMATION
CAUTION
87-900-851-01(A)
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