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Manuels Connexes pour Varian Turbo-V 1000 ICE E Série
Sommaire des Matières pour Varian Turbo-V 1000 ICE E Série
- Page 1 MANUALE DI ISTRUZIONI Turbo-V 1000 ICE BEDIENUNGSHANDBUCH E-series NOTICE DE MODE DíEMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU«’ES BEDRIJFSHANDLEIDING Model 969-9128 INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKƒSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-942-01(A) APRIL 2002...
- Page 2 Turbo-V 1000 ICE E-series...
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Page 5: Table Des Matières
ISTRUZIONI PER LíUSO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE DíEMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRU«’ES PARA O USO....................9 GEBRUIKSAANWIJZINGEN..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KƒYTT÷OHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Page 6: Informazioni Generali
ISTRUZIONI PER LíUSO INFORMAZIONI GENERALI Questa apparecchiatura Ë destinata ad uso professionale. L'utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Varian prima dell'utilizzo dell'apparecchiatura. La Varian si ritiene sollevata eventuali responsabilit‡ dovute... - Page 7 Quando la pompa viene utilizzata per il pompaggio di gas controllori Varian (serie 969-9464 220V, 969-9564 120V) e tossici, infiammabili o radioattivi, seguire le appropriate devono essere collegate ad una pompa primaria (vedere procedure tipiche di ciascun gas.
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Page 8: Vor Der Installation
Nichtbeachtung -auch teilweise- der enthaltenen Hinweise, unsachgem‰flem Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen Miflachtung einheimischen, hier zur Geltung kommenden Bestimmungen ¸bernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V1000 ICE E-series handelt sich Turbomolekularpumpen f¸r Hoch- Ultrahochvakuumanwendungen. Sie eignen sich insbesonders f¸r... - Page 9 Pumpengheh‰use unter 50bC abgesunken ist. Wenn die Pumpen ¸ber ihr Unterteil installiert werden sollen, Bei einem Defekt kann der Varian Service oder der " advanced m¸ssen in die Bohrungen des Unterteils 3 M6-Schrauben exchange service" in Anspruch genommen werden.
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Page 10: Indications Generales
Varian, avant d'utiliser l'appareil. Varian dÈcline par consÈquent toute responsabilitÈ en cas d'inobservation totale ou partielle des instructions donnÈes, d'utilisation incorrecte de la part d'un personnel non formÈ, d'opÈrations non autorisÈes ou d'un emploi contraire... -
Page 11: Utilisation
"advanced exchange service", remplir et Toutes les instructions pour le fonctionnement correct de la faire parvenir au bureau local Varian la fiche "SÈcuritÈ et turbopompe sont contenues dans la notice de l'unitÈ de SantÈ" annexÈe ‡ la prÈsente notice d'instructions. Une copie contrÙle. -
Page 12: Informacion General
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... - Page 13 4,5 Nm. En caso de averÌa se podr· utilizar el servicio de reparaciÛn Varian o el "Varian advanced exchange service", que permite Para instalar los accesorios opcionales, vÈase ìTechnical obtener una bomba regenerada para sustituir la averiada.
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Page 14: Instru«'Es Para O Uso
Varian antes de usar a aparelhagem. A Varian n„o se responsabiliza pela eventual inobserv‚ncia total ou parcial das instruÁıes, pelo uso indevido por parte de pessoas n„o treinadas, por operaÁıes n„o autorizadas ou pelo uso contr·rio ‡s normas... - Page 15 Em caso de defeito È possÌvel usufruir do serviÁo de reparaÁ„o trÍs parafusos M6 fixados aos furos especÌficos existentes na Varian ou do "Varian advanced exchange service", que permite base da bomba. Os parafusos utilizados devem possuir um obter uma bomba regenerada que substitua a bomba com...
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Page 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Page 17 ! ! ! ! series mogen alleen gebruikt worden in combinatie met een GEVAAR! van de speciale Varian controllers (serie 969-9464 220V, 969- Wanneer de pomp wordt gebruikt voor het pompen van 9564 120V) en moeten aangesloten zijn op een primaire pomp...
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Page 18: Brugsanvisning
Brugeren bedes lÊse denne hÂndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er n¯je fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb pÂ... - Page 19 TurbomolekulÊrpumperne i V1000 ICE-E series serien m kun NÂr pumpen anvendes til pumpning af giftige, brandfarlige eller anvendes med en af de sÊrlige Varian kontrolapparater (serie radioaktive gasser, skal de gÊldende forskrifter for den enkelte 969-9464 220 V, 969-9564 120V) og skal forbindes med en gastype strengt overholdes.
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Page 20: Bruksanvisning
Anv‰ndaren bˆr l‰sa denna bruksanvisning, samt ˆvrig dokumentation frÂn Varian fˆre anv‰ndning av utrustningen. Varian tar inget ansvar fˆr skador helt eller delvis till fˆljd av Âsidos‰ttande av instruktionerna, ol‰mplig anv‰ndning av person utan tillr‰cklig kunskap, obehˆrigt bruk av utrustningen eller hantering som strider mot g‰llande lokala fˆreskrifter. - Page 21 DÂ pumpen anv‰nds fˆr pumpning av giftiga, l‰ttant‰ndliga Turbomolekyl‰rpumparna i serien V1000 ICE-E series mÂste eller radioaktiva typ, bˆr man fˆlja de s‰rskilda anvisningarna anv‰ndas med en s‰rskild styrenhet frÂn Varian (serie 969- fˆr varje enskild gas. 9464 220V, 969-9564 120V), och anslutas till en fˆrpump (se Anv‰nd ej pumpen i n‰rheten av explosiva gaser.
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Page 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren b¯r lese denne brukerveiledningen og all annen informasjon fra Varian f¯r utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer p grunn av manglende oppf¯lging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som pÂ... - Page 23 Se ìTeknisk informasjonî for detaljer. ADVARSEL! Turbo-V1000 ICE-E series serien turbo-molekulÊre pumper NÂr pumpen brukes for  pumpe giftige, brannfarlige eller m kun brukes med en av de spesielle Varian kontrollere (serie radioaktive gasser skal de relevante forskriftene for de enkelte 969-9464 220V,...
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Page 24: Kƒytt÷Ohjeet
YLEISIƒ TIETOJA T‰m‰ laite on tarkoitettu ammattimaiseen k‰yttˆˆn. Ennen laitteen k‰yttˆˆnottoa tulee k‰ytt‰j‰n lukea huolellisesti mukana seuraava k‰yttˆohje sek‰ kaikki muu Varianin toimittama lis‰tieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen k‰yttˆohjeiden t‰ydest‰ tai osittaisesta laiminlyˆnnist‰, ammattitaidottoman henkilˆn virheellisest‰ laitteen k‰ytˆst‰,... - Page 25 VAARA! Sarjan V1000 ICE-E series turbomolekyylipumppuja tulee Jolloin pumppua k‰ytet‰‰n myrkyllisten, tulenvaarallisten ja k‰ytt‰‰ ainoastaan niihin sopivien varian valvojien kanssa radioaktiivisten kaasujen pumppaamiseen tulee seurata joka (sarja 969-9464 220V, 969-9564 120V) ja niiden t‰ytyy olla kaasuun sopivaa menettelytapaa. ƒlk‰‰ k‰yt‰ pumppua yhdistettyin‰...
- Page 26 Varian, prin ap“ th crhsimopo∂hsh thj suskeuˇj. H Varian den f◊rei kam∂a euq⁄nh “son afor£ thn olikˇ ˇ merikˇ aq◊thsh twn odhgiËn, thn akat£llhlh crˇsh ek m◊rouj anekpa∂deutou proswpiko⁄, auqa∂retej epemb£seij ˇ crˇsh pou den sumfwne∂ me touj eidiko⁄j eqniko⁄jkanonismo⁄j.
- Page 27 M10 Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto s◊rbij episkeuËn Varian ˇ sto ìVarian advanced exchange serviceî, Gia na stereËsete thn antl∂a m◊sw thj b£shj thj e∂nai pou saj d∂nei th dunat“thta na antikatastˇsete thn apara∂thto na crhsimopoiˇsete treij b∂dej M6 sterewm◊nej calasm◊nh antl∂a me m∂a £llh eniscum◊nh.
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Page 28: General Information
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, im- proper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards. - Page 29 The Turbo - V 1000 ICE-E series series pumps must only be When employing the pump for pumping toxic, flammable, or used with one of the special Varian controllers (series 969- radioactive gases, please follow the required procedures for 9464 220V, 969-9564 120V) and must be connected to a pri- each gas disposal.
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Page 30: Technical Information
TECHNICAL INFORMATION The Spiral Seal is a dynamic seal based on a DESCRIPTION OF THE TURBOPUMP Siegbahn disk that increases the protection of the The Turbo-V1000 ICE E-series pump is available bearings against corrosive gases. A special cen- with an ISO 200 high vacuum flange. trifugal stage, named centrifugal dust seal, is pro- vided in order to protect the pump bearings from particles contamination. -
Page 31: Technical Specification
Start-up time < 4 minutes * According to standard DIN 28 428, the base Recommended Varian VSp 60; Varian VSr 90 pressure is that measured in a leak-free test dome, forepump 48 hours after the completion of test dome bake-... - Page 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of inlet pressure vs foreline pressure with fixed inlet flow (Ar) 87-900-942-01(A)
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Page 33: Inlet Screen Installation
TECHNICAL INFORMATION Graph of inlet pressure vs foreline pressure with fixed inlet flow (N2) The screen can be mounted on each pump model. INLET SCREEN INSTALLATION The inlet screens mod. 969-9316 prevents the blades of the pump from being damaged by debris greater than 1.4 mm diameter. -
Page 34: Heating Jacket Installation
TECHNICAL INFORMATION HEATING JACKET INSTALLATION WATER COOLING KIT INSTALLATION Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9338 (metal- lic model), and 969-9348 (plastic model). - Page 35 TECHNICAL INFORMATION The water cooling kit 969-9338 has to be con- nected to a 3/8" internal diameter flexible water line. The water cooling kit 969-9348 has to be con- nected to a 6x8 (internal diameter x external di- ameter) metric flexible water line. Cooling may be carried out either through an open circuit with eventual discharge of the water, or us- ing a closed circuit cooling system.
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Page 36: Vent Device Installation
TECHNICAL INFORMATION VENT DEVICE INSTALLATION VENT VALVE INSTALLATION The vent valve mod. 969-9833 allows to avoid un- desired venting of the pump during a temporary power failure (5 sec maximum), and enables an automatic vent operation. The vent device mod. 969-9831 allows to avoid undesired venting of the pump during a temporary Unscrew the vent port threaded plug (see figure power failure (adjustable time up to 36 min.), and... -
Page 37: Solid State Flowmeter Installation
CAUTION To prevent bearing damage, the integrated purge valve is foreseen for a gas flow rate of 20 sccm (0.34 mbar l/s). Please contact Varian for specific SOLID STATE FLOWMETER INSTALLATION applications. A gas purge valve is integrated to protect the pump... -
Page 38: Typical Layout Diagram
TECHNICAL INFORMATION TYPICAL LAYOUT DIAGRAM Turbo-V controller 13. Turbopump Vent valve 14. Flexible connection Vacuum pump shut-off valve (optional) 15. Solid state flowmeter System vent valve (optional) Vacuum chamber Ionisation gauge Fore-vacuum pump connecting flange Oil mist eliminator Fore-vacuum pump with internal one-way valve 10. -
Page 39: Connection A - High Vacuum Flange
TECHNICAL INFORMATION Then fix the two flanges with the clamps or claws Connection A - HIGH VACUUM FLANGE as shown in the figure. To connect the Turbo pump to the ISO inlet flange, remove the outer ring and position the centering ring as shown in the figure. -
Page 40: Suggested Pump Installation
The heater jacket working tempera- ture should be adjusted on the pump control unit (see controller manual for reference). Ask VARIAN for proper temperature setting. Heater jacket must be always on even during start-up and shutdown. -
Page 41: Pump Used In Presence Of Magnetic Fields
Varian's specialist. As a matter of fact, in case of high magnetic fields, also important forces might be generated and ap- For a complete overview of Varian's extensive plied to the rotor. product lines, please refer to the Varian catalog. 87-900-942-01(A) -
Page 42: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Page 43 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 44 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...