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TV 1001
Pump models:
969-8939
Controller model:
969-8978
87-900-973-01
SEPTEMBER 2003
SEM
969-8940
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE DíEMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRU«'ES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKƒSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL

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Manuels Connexes pour Varian TV 1001 SEM

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  • Page 1 MANUALE DI ISTRUZIONI TV 1001 BEDIENUNGSHANDBUCH NOTICE DE MODE DíEMPLOI MANUAL DE INSTRUCCIONES Pump models: MANUAL DE INSTRU«’ES 969-8939 969-8940 BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG Controller model: BRUKSANVISNING 969-8978 INSTRUKSJON MANUAL OHJEKƒSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-973-01 SEPTEMBER 2003...
  • Page 2 TV 1001 SEM...

  • Page 5: Table Des Matières

    Window Meanings ......................34 INLET SCREEN INSTALLATION ....................35 AIR COOLING KIT INSTALLATION ....................36 TV 1001 SEM with Navigator Controller................36 TV 1001 SEM Pump with Standard Rack Controller............36 WATER COOLING KIT INSTALLATION ..................37 VENT ACCESSORIES.........................38 TV 1001 SEM Controller Compatible ................38 Standard Rack Controller Compatible ................39 VIBRATION ISOLATOR INSTALLATION..................39...

  • Page 6: Informazioni Generali

    (vedere schema in "Technical Information"). cati durante il trasporto, contattare l'ufficio vendite locale. Du- rante l'operazione di disimballaggio, prestare particolare atten- zione a non lasciar cadere la TV 1001 SEM e a non sotto-porla ad urti o vibrazioni. 87-900-973-01...

  • Page 7: Fissaggio Della Pompa

    TIONî nellíappendice ìTechnical Informationî). La turbopompa con flangia di ingresso ISO 200 F deve essere Il LED verde posto sul pannello della base della TV 1001 SEM fissata alla camera da vuoto per mezzo dell'apposita minuteria indica, con la frequenza del suo lampeggio, le condizioni ope- meccanica Varian.

  • Page 8: Gebrauchsanleitung

    Vakuum in Ber¸hrung kommen, nicht mit den bloflen H‰nden gen Normen ¸bernimmt die Firma Varian keinerlei Haftung. angefaflt werden. Es sind stets Schutzhandschuhe oder andere Bei den Pumpen der Serie TV 1001 SEM handelt es sich um Schutzmittel zu verwenden. Turbomolekularpumpen f¸r Hoch- und Ultrahochvakuuman- wendungen.

  • Page 9: Befestigung Der Pumpe

    Vorrichtung mufl daher an eine Speisungsleitung angeschlos- Not-Aus sen werden, die dieser Kategorie entspricht. Der TV 1001 SEM hat Verbinder f¸r den Ein-und Ausgang und die Zur Stillsetzung von Mod. TV 1001 SEM in Notsituationen ist Schnittstellenkommunikation, die an die Auflenkreise angeschlossen vom Controller das Netzkabel abzuziehen.

  • Page 10: Indications Generales

    Pendant l'opÈration d'ouverture de l'emballage, veiller tout par- INDICATIONS GENERALES ticuliËrement ‡ ne pas laisser tomber le TV 1001 SEM et ‡ ne Cet appareillage a ÈtÈ conÁu en vue d'une utilisation profes- lui faire subir aucun choc et aucune vibration.

  • Page 11: Fixation De La Pompe

    ArrÍt du TV 1001 SEM Le TV 1001 SEM appartient ‡ la deuxiËme catÈgorie d'installa- Pour arrÍter le TV 1001 SEM, il suffit de retirer la tension d'alimen- tions (ou surtension) prÈvue par la norme EN 61010-1. De ce tation. Le contrÙleur incorporÈ arrÍte immÈdiatement la pompe.

  • Page 12: Instrucciones De Uso

    INSTRUCCIONES DE USO Durante la operaciÛn de desembalaje, tener cuidado de que no INFORMACI”N GENERAL se caiga el TV 1001 SEM y de no someterlo a golpes o Este equipo es para uso profesional. El usuario ha de leer vibraciones.
  • Page 13 Fijar el TV 1001 SEM en posiciÛn estable, montando la brida gases explosivos. de entrada de la turbo-bomba en la contrabrida del sistema, con conexiÛn capaz de resistir a un par de 8900 Nm en torno a Encendido y Uso del TV 1001 SEM su propio eje.

  • Page 14: Instru«'Es Para O Uso

    "Technical Information". especial; se esta apresentar sinais de danos, que poderiam ter O TV 1001 SEM deve ser ligado a uma bomba prim·ria ocorrido durante o transporte, entrar em contacto com o (consultar esquema em "Technical Information").
  • Page 15 Acendimento e UtilizaÁ„o do TV 1001 SEM Por exemplo, o flange ISO-K pode ser fixado com bornes de aÁo de alta resistÍncia (como o modelo Varian IC 63250 Para ligar o TV 1001 SEM È suficiente fornecer a tens„o de DCMZ). alimentaÁ„o.

  • Page 16: Gebruiksaanwijzingen

    GEBRUIKSAANWIJZINGEN Zorg er bij het uitpakken voor dat de TV 1001 SEM niet kan ALGEMENE INFORMATIE vallen en geen stoten of trillingen te verduren krijgt. Deze apparatuur is bestemd voor beroepsmatig gebruik. De Laat verpakking niet ergens buiten achter. gebruiker wordt verzocht aandachtig deze handleiding en alle overige...
  • Page 17 De ISO-K-flens kan bijvoorbeeld bevestigd worden met stalen klemmen met een hoge weerstand (zoals het model Varian IC Om de TV 1001 SEM in te schakelen is het voldoende om deze 63250 DCMZ). van stroom te voorzien. De ingebouwde controller herkent...

  • Page 18: Brugsanvisning

    TV 1001 SEM leveres i en speciel beskyttende emballage. Kontakt den lokale forhandler, hvis emballagen viser tegn p skader, der kan vÊre opstÂet under transporten. S¯rg for, at TV 1001 SEM ikke tabes eller udsÊttes for st¯d ved udpakningen. Smid ikke emballagen ud. Materialet kan genbruges 100% og opfylder EU-direktiv 85/399 om milj¯beskyttelse.
  • Page 19 Start og anvendelse af TV 1001 SEM MontÈr TV 1001 SEM i en stabil position ved at montere turbopumpens indgangsflange p systemets kontraflange. For at starte TV 1001 SEM er det tilstrÊkkeligt at tilslutte et Forbindelsen skal kunne tÂle et drejemoment p 8.900 Nm forsyningsstik.

  • Page 20: Bruksanvisning

    Komponenter som skall uts‰ttas fˆr vakuum fÂr inte hanteras dokumentation frÂn Varian fˆre anv‰ndning av utrustningen. med bara h‰nder p g a kontamineringsrisken. Anv‰nd alltid Varian tar inget ansvar fˆr skador helt eller delvis till fˆljd av handskar eller liknande skydd. Âsidos‰ttande av instruktionerna, ol‰mplig anv‰ndning av person utan tillr‰cklig kunskap, obehˆrigt bruk av utrustningen...
  • Page 21 Att st‰nga av TV 1001 SEM TV 1001 SEM-systemet kan inte fastsp‰nnas med sin egen bas. Om du vill st‰nga av TV 1001 SEM behˆver du bara dra ut elkabeln ur v‰gguttaget. Den inbyggda styrenheten avbryter omedelbart pumpens funktion. VIKTIGT ! Nˆdstopp...

  • Page 22: Brukerveiledning

    TV 1001 SEM m koples til en hovedpumpe (se skjema i NÂr TV 1001 SEM pakkes ut, m du se til at det ikke slippes "Teknisk informasjon"). ned eller utsettes for noen form for st¯t.
  • Page 23 Forsikre deg om at isoleringen av anordningen pumpen m luftes ved  Âpne den aktuelle ventilen og deretter koplet til TV 1001 SEM har en egnet isolering, ogs under vente til rotoren har stanset og pumpens overflatetemperatur er forhold med en enkel feil i f¯lge EN 61010-1 standarden.

  • Page 24: Kƒytt÷Ohjeet

    Lis‰tietoja lˆytyy ìTekniset tiedotî TV 1001 SEM toimitetaan erityisess‰ suojapakkauksessa; -liitteest‰. mik‰li siin‰ on mahdollisesti kuljetuksen aikana tapahtuneita TV 1001 SEM tulee kytke‰ p‰‰pumppuun (ks. ìTekniset tiedotî vaurioita, ottakaa yhteys paikalliseen myyntitoimistoon. -liitteen kaaviota). Pakkauksen purkamisen aikana tulee varoa erityisesti TV 1001 SEMin putoamista tai siihen kohdistuvia iskuja tai t‰rinˆit‰.
  • Page 25 Varianin mekaanisten varusteiden vilkkuu hitaasti (noin 400 ms:n jakso): systeemi on avulla. Lis‰tietoja lˆytyy ìTekniset tiedotî -liitteest‰. kiihdytys-, jarrutus-, pys‰ytys- tai ìWaiting for interlockî- TV 1001 SEM voidaan asentaa mihin tahansa asentoon. tilassa; vilkkuu nopeasti (noin 200 ms:n jakso): virhetila. HUOM TV 1001 SEMia ei voida kiinnitt‰‰...
  • Page 26 Kat£ th di£rkeia tou ano∂gmatoj thj suskeuas∂aj, dËste idia∂terh prosocˇ Ëste na mhn afeqe∂ kai p◊sei to TV 1001 SEM kai na mhn uposte∂ ctupˇmata ˇ donˇseij. Mhn egkatale∂pete th suskeuas∂a sto perib£llon. To ulik“...

  • Page 27: Στερεωση Τησ Αντλιασ

    (hv upevrtash«) pou problevpetai apov ton Gia na stamatˇsete to TV 1001 SEM e∂nai arket“ na afair◊sete kanonismov EN 61010-1. Katav sunevpeia sundevete th thn t£sh trofod“thshj. O enswmatwm◊noj elegktˇj stamat£ diavtaxh se mia grammhv trofodovthsh« h opoiva ikanopoieiv am◊swj thn antl∂a.

  • Page 28: General Information

    See the appendix "Technical In- PREPARATION FOR INSTALLATION formation" for detailed information. The TV 1001 SEM must be connected to a primary pump (see The TV 1001 SEM is supplied in a special protective packing. If "Technical Information").

  • Page 29: Pump Fixing

    Switching on and Use of TV 1001 SEM jected from the pump or system, which could cause serious To switch on the TV 1001 SEM it is necessary to supply the injury or death and/or damage to surrounding equipment. mains to the controller (optional). It automatically recognizes the interlock and start signals presence and start up the pump.

  • Page 30: Description Of The Tv 1001 Sem

    TECHNICAL INFORMATION DESCRIPTION OF THE TV 1001 SEM Pump Description The TV 1001 SEM pumping system consists of a The pump consists of a high frequency motor driv- pump with a dedicated controller fixed to it. The ing a turbine fitted with 8 bladed stages and 4 system is available in two models that differ in the Macrotorr stages.

  • Page 31: Controller Description

    Start-up time < 4 minutes NOTE Recommended DS 402, TriScroll 300 When the TV 1001 SEM has been stored at a forepump temperature less than 5KC, wait until the system has reached the above mentioned temperature. Operating position Operating ambient...

  • Page 32: Tv 1001 Sem Outline

    TECHNICAL INFORMATION Typical Vibration Spectrum TV 1001 SEM OUTLINE The following figure shows the TV 1001 SEM outlines (dimensions are in mm [inches]). Turbo 1001 Macro Torr Turbo - 1001 Macro Torr 87-900-973-01...
  • Page 33 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-973-01...

  • Page 34: Interconnections

    TECHNICAL INFORMATION INTERCONNECTIONS J1 - IN-OUT The following figure shows the TV 1001 SEM in- terconnections. This connector carries all the input and output sig- Turbo V 1001 Macro Torr nals to remote control the TV 1001 SEM. It is a 15-pins D type connector; the available sig- nals are detailed in the table, the following para- graphs describe the signal characteristics and use.
  • Page 35 TECHNICAL INFORMATION For example: SPEED SETTING: PWM input signal to set the pump speed. The PWM signal characteristics must − reference quantity: frequency be the following: − threshold: 500 Hz • frequency: 100 Hz +/-20% − hysteresis: 1% • ampitude: 24 V max −...

  • Page 36: How To Connect The Open-Collector Inputs Of The Controller

    How to connect the open-collector inputs of the controller Here below there are the typical connections of the open collector input of TV 1001 SEM to an exter- nal system. Two cases are considered: 1. the customer supplies the 24 Vdc 2.

  • Page 37: How To Connect The Outputs Of The Controller

    TECHNICAL INFORMATION How to connect the outputs of the controller RS 232/RS 485 COMMUNICATION DESCRIPTION The following figure shows a typical logic output connection (relay coil) but any other device may be Both the RS 232 and the RS 485 interfaces are connected e.g.
  • Page 38 TECHNICAL INFORMATION − Source: Controller <DATA> = an alphanumeric ASCII string with Destination: PC the data to be written into the window. In case of a reading command this field is not present. The field length is variable according to the data type as per the following table: STX ADDR ACK ETX DATA TYPE...

  • Page 39: Window Meanings

    Off = 0 type 1 = Current (on = closed) 2 = Time (default = 1) (default = 0) Reserved to Varian service Set Point (default = 643) threshold Set the vent Automatic = 0 (expressed valve (see note 1.)

  • Page 40: Inlet Screen Installation

    The inlet screen, however, does reduce the pump- mand) ing speed by about 10%. Reserved to Varian service The inlet screen is fitted in the upper part of the pump, as shown in the figure. QE5XXXX EPROM (where ìXXXXî...

  • Page 41: Air Cooling Kit Installation

    TECHNICAL INFORMATION The following figure shows the overall flange di- To fix the fan to the TV 1001 SEM case execute mensions with the protection screen fitted on the following procedure (see the following figure): pump with ISO 200F flange and pump with ISO 1.

  • Page 42: Water Cooling Kit Installation

    TECHNICAL INFORMATION Fan specification: − air flow: 55 l/s (120 CFM) − input voltage: 120 Vac 50-60 Hz − maximum power: 17 W − dimensions: 127 x 127 mm (5 x 5 inches) To fix the fan to the pump, position it ensuring that the holes in the plate line up with those in the pump base.

  • Page 43: Vent Accessories

    TV 1001 SEM Controller Compatible Vent Valve mod. 969-9834 This vent valve waits before opening a minimum time of about 5 sec. This time can be increased up to about 220 min.

  • Page 44: Standard Rack Controller Compatible

    969-9374 for ISO 200F flange. They typically reduce the vibration transmitted from the TV 1001 SEM to the system by a factor G that depends on vibration frequency. In the follow- ing table you can find the values of G for the most relevant peaks in the pump vibration spectrum.

  • Page 45: Double Damper

    The supplied serial cable must be installed when PURGE VALVE INSTALLATION the TV 1001 SEM or the optional vent valve have to be controlled by means of a remote computer. A gas purge valve is available to protect the pump...

  • Page 46: Tv 1001 Sem Controller Installation

    TECHNICAL INFORMATION TV 1001 SEM CONTROLLER INSTALLATION Side mounting The controller can be mounted in two position: NOTE − bottom mounting (as per the complete system) The L-shaped bracket (P/N 969-9298) is available as an option. − side mounting. See the following figure.

  • Page 47: Typical Layout Diagram

    TECHNICAL INFORMATION TYPICAL LAYOUT DIAGRAM With Standard Rack Controller With Navigator Controller 1. Turbo-V Navigator controller 1. Turbo-V standard rack controller 2. Vent valve 2. Vent valve 3. Vacuum pump shut-off valve (optional) 3. Vacuum pump shut-off valve (optional) 4. System vent valve (optional) 4.

  • Page 48: Connection A Ñ High Vacuum Flange

    NOTE STRUCTION FOR USE" section. Specifically pay attention to clamp design, material of clamps and The TV 1001 SEM pump is characterized by its bolts and bolt fixing torque. high compression ratio also for oil vapors. When using a mechanical oil-sealed pump, it is advisable...

  • Page 49: Connection C Ñ Electrical

    TECHNICAL INFORMATION Connection C ñ ELECTRICAL CAUTION To prevent bearing damage, Varian suggests a minimum purge gas flow rate of 10 sccm (0.17 mbar l/s). This value can be exceeded, according to the process requirements. Please contact Var- ian for specific applications.

  • Page 50: Pump Used In Presence Of Magnetic Fields

    However if the effect is grater, than the case Vent valve for standard rack controller 969-9843 should be carefully reviewed by Varianís specialist. Vent valve for Navigator Controller 969-9834 As a matter of fact, in case of high magnetic fields,...

  • Page 51: Customer Information

    NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
  • Page 52 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
  • Page 53 Fax: (82) 2 3452 2451 Korea China Mexico Tel: (82) 2 3452 2452 (dedicated line) Varian Technologies - Beijing Varian, S. de R.L. de C.V. vtk.technical.support@varianinc.com Room 1201, Jinyu Mansion Concepcion Beistegui No 109 No. 129A, Xuanwumen Xidajie Col Del Valle Xicheng District C.P.

Ce manuel est également adapté pour:

969-8939969-8940969-8978

Table des Matières