Table Des Matières - Varian Turbo-V 1000 ICE E Série Mode D'emploi

ISTRUZIONI PER LíUSO .................................................................................................... 1
GEBRAUCHSANLEITUNG ................................................................................................. 3
MODE DíEMPLOI ................................................................................................................ 5
INSTRUCCIONES DE USO ................................................................................................ 7
INSTRU«'ES PARA O USO.............................................................................................. 9
GEBRUIKSAANWIJZINGEN............................................................................................. 11
BRUGSANVISNING .......................................................................................................... 13
BRUKSANVISNING .......................................................................................................... 15
BRUKERVEILEDNING ...................................................................................................... 17
KƒYTT÷OHJEET .............................................................................................................. 19
PDHGIES CRHSEWS ............................................................................................................ 21
INSTRUCTIONS FOR USE............................................................................................... 23
TECHNICAL INFORMATION ............................................................................................ 25
DESCRIPTION OF THE TURBOPUMP ......................................................................................25
TECHNICAL SPECIFICATION ....................................................................................................26
INLET SCREEN INSTALLATION ................................................................................................28
HEATING JACKET INSTALLATION............................................................................................29
WATER COOLING KIT INSTALLATION .....................................................................................29
VENT DEVICE INSTALLATION...................................................................................................31
VENT VALVE INSTALLATION ....................................................................................................31
SOLID STATE FLOWMETER INSTALLATION...........................................................................32
PUMP USED WITH CORROSIVE GASES..................................................................................32
TYPICAL LAYOUT DIAGRAM .....................................................................................................33
Connection A - HIGH VACUUM FLANGE .........................................................................34
Connection configurations .................................................................................................34
Connection B - FORE-VACUUM PUMP ............................................................................34
Connection C - ELECTRICAL............................................................................................34
SUGGESTED PUMP INSTALLATION.........................................................................................35
ROUGHING OPERATION ...........................................................................................................35
Pump and chamber at atmosphere ...................................................................................35
Pump under vacuum, chamber at atmosphere (chamber cleaning)..................................35
PUMP USED IN PRESENCE OF MAGNETIC FIELDS ...............................................................36
ACCESSORIES ...........................................................................................................................36