Vent Device Installation; Vibration Isolator Installation; Typical Layout Diagram - Varian Turbo-V 150HT Mode D'emploi

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VENT DEVICE INSTALLATION

The vent device mod. 969-9831 allows to avoid
undesired venting of the pump during a temporary
power failure (adjustable time up to 36 min.), and
enables an automatic vent operation.
Unscrew and remove the threaded plug (see figure
below).
Screw the flange mod. 969-9108 on the pump, tak-
ing care of the o-ring right position.
Assemble the seal ring and lock the vent device in
position using the KF klamp.

VIBRATION ISOLATOR INSTALLATION

Two vibration isolators for ISO and CFF inlet flange
version pumps are available as accessories.
The two model part numbers are the following:
− model 969-9332 for CFF 6" flange;
− model 969-9342 for ISO 100 flange.
They typically reduce the vibration transmitted from
the Turbo-V 150HT pump to the system by a factor
of 20.
Please refer to the relevant instruction manual.

TYPICAL LAYOUT DIAGRAM

1.
Turbo-V controller
2.
Vent valve
3.
Vacuum pump shut-off valve (optional)
4.
System vent valve (optional)
5.
Vacuum chamber
6.
Ionisation gauge
7.
Fore-vacuum pump connecting flange
8.
Oil mist eliminator
9.
Fore-vacuum pump with internal one-way
valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
13. Turbopump
14. Flexible connection
32
TECHNICAL INFORMATION
87-900-891-01(C)

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Ce manuel est également adapté pour:

969-9369969-9370969-9371969-9372

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