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TECHNICAL SPECIFICATION
Pumping speed
N
: 1600 l/s
2
He: 1850 l/s
H
: 1750 l/s
2
Compression ra-
N
: >1 x 10
2
tio
He: 2.5 x 10
H
: 6 x 10
2
Base pressure*
1 x 10
(7.5 x 10
Inlet flange
ISO 250
CFF 12"
Foreline flange
ISO 63
Vent port flange
KF 10 NW
Purge port
KF 10 NW
flange
Rotational speed
27000 rpm
Start-up time
10 minutes
Recommended
Varian SD 700
forepump
Operating
Vertical/inverted
position
(max slope 10°)
Operating ambi-
+ 5° C to + 35° C
ent temperature
10
5
3
-10
mbar
-11
Torr)
CFF 12.5"
Coolant water
Bakeout
temperature
Vibration level
(displacement)
Noise level
Input
Lubricant
Storage
temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test
dome, 48 hours after the completion of test dome
bake-out, with a Turbopump fitted with a ConFlat
flange and using the recommended pre-vacuum
pump.
26
TECHNICAL INFORMATION
flow: 70 l/h (0.3 GPM)
temperature: +10° C to +30°
C
pressure: 2 to 4 bar
(30 to 60 Psi)
120° C at inlet flange
maximum
< 0.02 µm at inlet flange
≤ 52 dB (A) at 1 meter
90 Vac, three phase, 450 Hz
permanent lubrication
- 20° C to + 70° C
62 (137)
87-900-867-01(A)
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