Technical Specification - Varian Turbo-V 70D Mode D'emploi

TECHNICAL SPECIFICATION

Pumping speed (l/s) With CF 4.5" or
Compression ratio
Base pressure* with recommended mechanical
fore pump:
1 x 10
with recommended diaphragm
fore pump:
1 x 10
Inlet flange CF 4.5" O.D.
ISO63
CF 2.75" O.D.
KF 40 NW
Foreline flange KF 16 NW
Rotational speed 75000 RPM
Start-up time < 60 seconds
Recommended fore- mechanical: Varian DS102
pump diaphragm: Varian SH100
Operating position any
Cooling requirements Natural air convection
Forced air or water optional
With CF 2.75"
ISO 63: or
N : 60 l/s KF 40 NW:
2
He: 30 l/s N : 40 l/s
2
H : 20 l/s He: 27 l/s
2
H
: 20 l/s
2
7
N : 5 x 10
2
3
He: 7 x 10
3
H : 1.5 x 10
2
-9 -10
mbar (8 x 10 Torr)
-9 -7
mbar (8 x 10 Torr)
Operating ambient
temperature
Coolant water
Bakeout temperature
Vibration level
(displacement)
Noise level
Input
Lubricant
Installation category
Pollution degree
Storage temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base pres-
sure is that measured in a leak-free test dome, 48
hours after the completion of test dome bake-out,
with a Turbopump fitted with a ConFlat flange and
using the recommended pre-vacuum pump.
53
TECHNICAL INFORMATION
+ 5° C to + 35° C
flow: 10 l/h (0.05 GPM)
temperature: + 10° C to + 30° C
pressure: 2 to 4 bar (30 to 60 Psi)
120° C at inlet flange max. (CF
flange)
80° C at inlet flange max. (ISO
flange)
< 0.01 μm at inlet flange
45 dB (A) at 1 meter
54 Vac, three phase, 1250 Hz
permanent lubrication
II
2
- 20° C to + 70° C
ISO: 2.3 (6)
CFF: 1.6 (4)
87-900-861-01(G)