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NO!
WARNING!
To avoid injury, never put fingers or any objects whatso-
ever in the inlet port of the turbopump. The use of the pro-
tective screen is strongly advised (optional extra). If a vi-
bration damper or flexible metallic bellows are used on the
inlet port, make sure that the pump is fixed to the base.
The turbopump with ISO inlet flange must be fixed to the vac-
uum chamber by means of clamps or claws. The following table
shows, for each flange and fixing device, the necessary number
of clamps or claws and the relevant fixing torque.
FLANGE
FIXING
DEVICE
ISO 63
M10 clamps
M8 claws
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Varian hard-
ware. See the appendix "Technical Information" for a detailed
description.
To fix the pump by means of its base, it is necessary to use
three M4 screws fixed to the foreseen holes of the pump base.
The used screws must have a minimum strength point of 500
2
N/mm
and must be fixed with a torque of 0,9 Nm.
For installation of optional accessories, see "Technical Informa-
tion".
USE
All the instructions for the correct use of the turbopump are
contained in the control unit manual.
Read the manual carefully before using the pump.
In order to achieve a better (lower) base pressure, the pump
casing may be heated using the optional heater. While heating
the pump, the temperature of its inlet flange must not exceed
120 °C. Always use the water cooling system during the heating
operations.
WARNING!
Do not touch the turbopump or any of its accessories during the
heating process. The high temperatures may cause burns.
N.
FIXING TORQUE
4
22 Nm
4
11 Nm
51
INSTRUCTIONS FOR USE
Use air or inert gas free from dust or particles for venting the
pump. The pressure at the vent port must be less than 2 bar.
Avoid impacts, oscillations or harsh movements of the pump
when in operation. The bearings may become damaged.
For pumping aggressive gases, use
versions of the Turbo - V 70D pump. These pumps are fitted
with a special port through which a flow of inert gas must be
passed between 0,4 and 1 mbar l/s.
MAINTENANCE
The Turbo-V70D series pump does not require any mainte-
nance. Any work performed on the pump must be carried out by
authorized personnel.
WARNING!
Before carrying out any work on the turbopump, disconnect it
from the supply, vent the pump by opening the appropriate
valve, wait until the rotor has stopped turning and wait until the
surface temperature of the pump falls below 50 °C.
In the case of breakdown, contact your local Varian service
center who can supply a reconditioned pump to replace that
broken down.
NOTE
Before returning the pump to the constructor for repairs, or
replacement with a reconditioned unit, the "Health and Safety"
sheet attached to this instruction manual must be filled-in and
sent to the local sales office. A copy of the sheet must be in-
serted in the pump package before shipping.
If a pump is to be scrapped, it must be disposed of in accor-
dance with the specific national standards.
DISPOSAL
Meaning of the "WEEE" logo found in labels
The following symbol is applied in accordance with the EC
WEEE (Waste Electrical and Electronic Equipment) Directive.
This symbol (valid only in countries of the European Com-
munity) indicates that the product it applies to must NOT be
disposed of together with ordinary domestic or industrial waste
but must be sent to a differentiated waste collection system.
The end user is therefore invited to contact the supplier of the
device, whether the Parent Company or a retailer, to initiate the
collection and disposal process after checking the contractual
terms and conditions of sale.
CAUTION
CAUTION
CAUTION
the specially desgined
87-900-861-01(G)
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