Technical Specification - Varian 969-9085 Série Mode D'emploi

Table des Matières

Publicité

TECHNICAL SPECIFICATION

The following figure shows the Turbo-V2000HT pump outline drawing. Dimensions are in inches [mm].
Pumping speed
N
2
He: 2000 l/s
H
2
Compression ratio
N
2
He: 2 x 10
H
2
Base pressure*
Minimum with recommended
mechanical forepump:
1 x 10
Inlet flange
CFF 12" O.D.
ISO 250
Foreline flange
KF 40 NW
Rotational speed
33000 RPM
Start-up time
10 minutes
Recommended
DS 602
forepump
TriScroll 600
Operating position
Any
Cooling requirements
Water
Max rotor temperature
120 eC
Operating ambient tem-
+ 5e C to + 35e C
perature
: 1950 l/s
: 1500 l/s
9
: >1 x 10
6
5
: 2 x 10
-10
-11
mbar (7.5 x 10
Torr)
Coolant water
Bakeout temperature
Max rotor temperature
Vibration level (dis-
placement)
Input
Lubricant
Installation category
Pollution degree
Storage temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test
dome, 48 hours after the completion of test dome
bake-out, with a Turbopump fitted with a ConFlat
flange and using the recommended pre-vacuum
pump.
26
TECHNICAL INFORMATION
minimum flow: 200 l/h (0.89 GPM)
temperature: + 10e C to + 20e C
pressure: 3 to 5 bar (45 to 75 Psi)
120e C max. at inlet flange
(CF flange)
80e C max. at inlet flange
(ISO flange)
120 eC
< 0.01 µm at inlet flange
120 Vac, three phase, 550 Hz
permanent lubrication
II
2
- 20e C to + 70e C
ISO 250: 44 (96.8)
CFF 12î: 55 (121)
87-900-914-01(F)

Publicité

Table des Matières
loading

Ce manuel est également adapté pour:

969-9084 sérieTurbo-v 2000ht

Table des Matières