Table des Matières
Publicité
Liens rapides
Turbo-V 2000HT
969-9084 series
969-9085 series
87-900-914-01(F)
MARCH 2003
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE DíEMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRU«'ES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKƒSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
Publicité
Table des Matières
Manuels Connexes pour Varian 969-9085 Série
Sommaire des Matières pour Varian 969-9085 Série
- Page 1 MANUALE DI ISTRUZIONI Turbo-V 2000HT BEDIENUNGSHANDBUCH pumps NOTICE DE MODE DíEMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU«’ES 969-9084 series BEDRIJFSHANDLEIDING 969-9085 series INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKƒSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-914-01(F) MARCH 2003...
- Page 2 Turbo-V 2000HT...
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Page 5: Table Des Matières
ISTRUZIONI PER LíUSO ....................1 GEBRAUCHSANLEITUNG....................3 MODE DíEMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRU«’ES PARA O USO ....................9 GEBRUIKSAANWIJZINGEN ..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING......................15 BRUKERVEILEDNING ...................... 17 KƒYTT÷OHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Page 6: Informazioni Generali
Varian prima dell'utilizzo dell'ap- i componenti destinati ad essere esposti al vuoto. Utilizzare sempre i parecchiatura. La Varian si ritiene sollevata da eventuali responsabilit‡ guanti o altra protezione adeguata. dovute all'inosservanza totale o parziale delle istruzioni, ad uso impro- prio da parte di personale non addestrato, ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche. - Page 7 Le pompe turbomolecolari della serie Turbo-V2000HT devono infiammabili o radioattivi, seguire le appropriate procedure tipiche essere utilizzate solo con uno degli appositi controllori Varian (se- di ciascun gas. Non usare la pompa in presenza di gas esplosivi. rie 969-9462, 969-9562) e devono essere collegate ad una pompa primaria (vedere schema in "Technical Information").
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Page 8: Vor Der Installation
Anschlufl der Turbopumpe an die Anlage Falls die Lagerdauer aus verschiedentlichen Gr¸nden die genannte Frist ¸berschreiten sollte, ist die Pumpe an das Werk zur¸ckzusenden. F¸r Informationen wenden Sie sich bitte an den ˆrtlichen Varian Vertre- ter. VOR DER INSTALLATION Die Pumpe wird mit einer speziellen Schutzverpackung geliefert. Even- tuelle Transportsch‰den m¸ssen der zust‰ndigen ˆrtlichen Verkaufs-... - Page 9 Rotor vollkommen stillsteht und die Temperatur am ligen Flanschgrˆflen und Klemmenarten angegeben. Pumpengheh‰use unter 50[C abgesunken ist. FLANSCH KLEMM- ANZUGS- Bei einem Defekt kann der Varian Service oder der "Varian ad- SCHELLE MOMENT vanced exchange service" in Anspruch genommen werden. ISO 250 Doppelklemme mit...
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Page 10: Indications Generales
ÈlÈments devant Ítre exposÈs au vide. d'instructions ainsi que toute autre indication supplÈmentaire four- Mettre toujours des gants ou toute autre protection appro- nie par Varian, avant d'utiliser l'appareil. Varian dÈcline par consÈ- priÈe. quent toute responsabilitÈ en cas d'inobservation totale ou partielle des instructions donnÈes, d'utilisation incorrecte de la part d'un... -
Page 11: Utilisation
"advanced exchange service", remplir et faire parve- Collier simple ‡ filetage M10 22Nm nir au bureau local Varian la fiche "SÈcuritÈ et SantÈ" annexÈe ‡ la prÈsente notice d'instructions. Une copie de cette fiche devra La turbopompe avec bride díadmission ISO F 250 (bolted) doit Ítre mise dans l'emballage de la pompe avant l'expÈdition. -
Page 12: Almacenamiento
Varian antes de componentes destinados a someterse al vacÌo. Utilizar siempre los utilizar el equipo. Varian se considera libre de cualquier responsabilidad guantes u otra protecciÛn apropiada. debida al incumplimiento total o parcial de las instrucciones, al uso... - Page 13 (vÈase el apÈndice ìTechnical deber·n utilizar sÛlo con uno de los controladores apropiados Informationî). Varian (serie 969-9462, 969-9562) y se deber·n acoplar a una bomba primaria (vÈase esquema en "Technical Information". La turbobomba se puede instalar en cualquier posiciÛn. °PELIGRO! Cuando la bomba se utiliza para bombear gases tÛxicos,...
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Page 14: Instru«'Es Para O Uso
Para evitar problemas de perdas de g·s, n„o tocar com as m„os os informaÁ„o adicional fornecida pela Varian antes de usar a componentes destinados ‡ exposiÁ„o do v·cuo. Utilizar sempre luvas aparelhagem. - Page 15 FLANGE TIPO DE BORNE TORQUE Em caso de defeito È possÌvel usufruir do serviÁo de reparaÁ„o Varian ou do "Varian advanced exchange service", que permite APERTO obter uma bomba regenerada que substitua a bomba com defeito. ISO 250 Borne duplo com rosca M10...
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Page 16: Installatie
Varian verstrekte informatie door te lezen alvorens met de blote handen aangeraakt worden. Gebruik altijd het apparaat in gebruik te nemen. Varian acht zich niet handschoenen of een andere geschikte bescherming. aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht... - Page 17 De turbomoleculaire pompen van de serie V2000HT mogen alleen geleverd (zie bijlage ìTechnical Information"). gebruikt worden in combinatie met een van de speciale Varian controllers (serie 969-9462, 969-9562) en moeten aangesloten zijn op een primaire pomp (zie schema in "Technical information").
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Page 18: Brugsanvisning
For at undg afgasningsproblemer skal man ikke r¯re med de Varian har leveret, inden udstyret tages i brug. Varian er ikke bare hÊnder de dele, der vil bliver udsat for vakuum. Brug altid ansvarlig, hvis vejledningen ikke er n¯je fulgt, eller hvis den kun er... - Page 19 Hvis der findes magnetfelter m pumpen afskÊrmes. Se bilag Informationî). ìTechnical Informationî for yderligere detaljer. TurbomolekulÊrpumperne i Turbo-V2000HT serien m kun anvendes med en af de sÊrlige Varian kontrolapparater (serie ADVARSEL! 969-9462, 969-9562) og skal forbindes med en primÊr pumpe (se skemaet i "Technical Information").
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Page 20: Bruksanvisning
Utrustningen ‰r avsedd fˆr yrkesm‰ssig anv‰ndning. Anv‰ndaren bˆr l‰sa denna bruksanvisning, samt ˆvrig dokumentation frÂn Varian fˆre anv‰ndning av utrustningen. Varian tar inget ansvar fˆr skador helt eller delvis till fˆljd av Âsidos‰ttande av instruktionerna, ol‰mplig anv‰ndning av person utan tillr‰cklig kunskap, obehˆrigt bruk av utrustningen eller hantering som... - Page 21 Turbomolekyl‰rpumparna i serien V2000HT mÂste anv‰ndas med DÂ pumpen anv‰nds fˆr pumpning av giftiga, l‰ttant‰ndliga eller en s‰rskild styrenhet frÂn Varian (serie 969-9462, 969-9562), och radioaktiva typ, bˆr man fˆlja de s‰rskilda anvisningarna fˆr varje anslutas till en fˆrpump (se schemat " Technical information ").
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Page 22: Brukerveiledning
Brukeren b¯r lese denne brukerveiledningen og all annen Likevel anbefaler vi  holde den lukket til den er montert i informasjon fra Varian f¯r utstyret tas i bruk. Varian kan ikke systemet, slik at den ikke forurenses eller utsettes for holdes ansvarlig for hendelser som skjer pÂ... - Page 23 (argon eller kvelstoff) koples for  beskytte lagrene (se ìTeknisk Se ìTeknisk informasjonî for detaljer. informasjonî). Turbo-V2000HT serien turbo-molekulÊre pumper m kun brukes med en av de spesielle Varian kontrollere (serie 969-9462, 969- 9562), og m koples til hovedpumpen (se skjema i "Teknisk ADVARSEL! informasjon ").
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Page 24: Kƒytt÷Ohjeet
Jotta kaasun poistumisongelmilta v‰ltytt‰isiin, tyhjiˆˆn k‰yttˆohje sek‰ kaikki muu Varianin toimittama lis‰tieto. Varian ei tarkoitettuihin osiin tule koskea paljain k‰sin. Hanskojen tai muun ota vastuuta seurauksista, jotka johtuvat laitteen k‰yttˆohjeiden sopivan suojan k‰yttˆ on tarpeellinen. t‰ydest‰ tai osittaisesta laiminlyˆnnist‰, ammattitaidottoman henkilˆn... - Page 25 (typpi tai argooni) jotta laakerit suojataan (katso Informationì-liitteest‰. liite ìTechnical informationî). Sarjan V2000HT turbomolekyylipumppuja tulee k‰ytt‰‰ ainoastaan niihin sopivien varian valvojien kanssa (sarja 969-9462, 969-9562) ja niiden t‰ytyy olla yhdistettyin‰ p‰‰pumppuun (katso kaaviota VAARA! osasta "Technical Information"). Jolloin pumppua k‰ytet‰‰n myrkyllisten, tulenvaarallisten ja Turbopumppu voidaan asentaa mihin tahansa asentoon.
- Page 26 £llh pr“ sqeth plhrofor∂a pou d∂nei h Varian, prin ap“ th crhsimopo∂hsh thj suskeuˇj. H Varian den f◊rei kam∂a euq⁄ nh “ son afor£ thn olikˇ ˇ merikˇ aq◊thsh twn odhgiËn, thn akat£llhlh crˇsh ek m◊rouj anekpa∂deutou proswpiko⁄ , auqa∂retej epemb£seij ˇ crˇsh pou den sumfwne∂...
- Page 27 50F C. dagk£nwn kai me poio ze⁄ goj bidËmatoj pr◊pei na sficto⁄ n. Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto s◊rbij episkeuËn Varian ˇ sto ìVarian advanced exchange serviceî, pou FLANTZA EIDOS DAGKANHS ZEUGOS BIDWMATOS saj d∂nei th dunat“ thta na antikatastˇsete thn calasm◊nh antl∂a me m∂a £llh eniscum◊nh.
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Page 28: General Information
If for any reason the shelf life time is exceeded, the pump has to be returned to the factory. Please contact the local Varian Vacuum Sales and Service representative for informations. PREPARATION FOR INSTALLATION The pump is supplied in a special protective packing. - Page 29 Do not use the pump in presence of explosive gases. mation" for detailed information.The Turbo - V 2000HT series pumps must only be used with one of the special Varian control- MAINTENANCE lers (series 969-9462, 969-9562) and must be connected to a primary pump (see "Technical Information").
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Page 30: Technical Information
TECHNICAL INFORMATION The Turbo-V2000HT pump consists of a high fre- DESCRIPTION OF THE TURBOPUMP quency motor driving a turbine fitted with 8 bladed The Turbo-V2000HT pump is available in two ver- stages and 4 Macrotorr stages. The turbine rotates sions which differ only in their inlet flange. in an anticlockwise direction when viewed from the They are: high vacuum flange end. -
Page 31: Technical Specification
TECHNICAL INFORMATION TECHNICAL SPECIFICATION The following figure shows the Turbo-V2000HT pump outline drawing. Dimensions are in inches [mm]. Pumping speed : 1950 l/s Coolant water minimum flow: 200 l/h (0.89 GPM) He: 2000 l/s temperature: + 10e C to + 20e C : 1500 l/s pressure: 3 to 5 bar (45 to 75 Psi) Compression ratio... - Page 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-914-01(F)
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Page 33: Inlet Screen Installation
TECHNICAL INFORMATION INLET SCREEN INSTALLATION WATER COOLING KIT INSTALLATION Two types of water cooling kits are available to be The inlet screens prevents the blades of the pump mounted when the pump is used under heavy load from being damaged by debris greater than 3 mm conditions or when air cooling is insufficient. - Page 34 TECHNICAL INFORMATION The assembled kit must be screwed into the suit- Two 6 mm (1/4") internal diameter rubber or plas- able holes of the pump body with a recommended tic hoses from the water supply must be fitted to closing torque of 5 Nm. the two nozzles.
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Page 35: Vent Device Installation
TECHNICAL INFORMATION VENT DEVICE INSTALLATION VENT VALVE INSTALLATION The vent valve mod. 969-9843 allows to avoid un- desired venting of the pump during a temporary power failure (5 sec maximum), and enables an The vent device mod. 969-9831 allows to avoid automatic vent operation. -
Page 36: Gas Purge Valve Installation
CAUTION To prevent bearing damage, Varian suggests the following purge gas flow rates: 10 sccm (0.17 mbar l/s) for a mild purge process, or 20 sccm (0.34 mbar l/s) for an heavy process. -
Page 37: Typical Layout Diagram
TECHNICAL INFORMATION The recommended procedure to vent the system TYPICAL LAYOUT DIAGRAM and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points: Close the corrosive gas flow into the system. Leaving the Turbo-V pump and the backing pump running and the purge gas flowing, wait for enough time to evacuate the corrosive... -
Page 38: Connection B - Fore-Vacuum Pump
Connection C - ELECTRICAL as shown in the figure. For ConFlat flange connections we recommend using Varian hardware. Other hardware can be used if it satisfies to this specifications: − stainless steel screws − minimum strength point of 500 N/mm −... -
Page 39: Moving The Gas Purge Valve And Forevacuum Pump Connections
Dual stage rotary vane pump DS 949-9335 602 with single phase motor Dual stage rotary vane pump DS 949-9336 602 with 3 phase motor For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. 87-900-914-01(F) -
Page 40: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Page 41 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 42 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...