Connection B - Fore-Vacuum Pump; Connection C - Electrical - Varian 969-9085 Série Mode D'emploi

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Then fix the two flanges with the clamps or claws
as shown in the figure.
For ConFlat flange connections we recommend
using Varian hardware. Other hardware can be
used if it satisfies to this specifications:
− stainless steel screws
− minimum strength point of 500 N/mm
− length: 63.5 mm (2.5 inches).
To facilitate assembly and dismantling, apply Fel-
pro C-100 high temperature lubricant to the screw
threads protruding from the flange and between
the nuts and flange.
!
Exercise care when tightening nuts and bolts to
avoid creating dents in the envelope as this may
cause the pump rotor to lock.

Connection B - FORE-VACUUM PUMP

A flange KF 40 NW is available to connect the
Turbopump to the fore-vacuum pump. A hose or
vacuum approved pipe can be used. If a rigid pipe
is used, any vibration generated by the mechani-
cal pump must be eliminated through the use of
bellows.
NOTE
The Turbo pump is characterized by its high com-
pression ratio also for oil vapors. When using a
mechanical oil-sealed pump, it is advisable to in-
stall a suitable trap between the turbopump and
the fore-vacuum pump in order to prevent oil back-
streaming.
2
CAUTION

Connection C - ELECTRICAL

The turbopump is connected to the controller
through an 8-pin connector. Pins B, C and D are
the 3-phase supply to the motor, pins A and F are
connected to the upper bearing temperature sen-
sor, pins A and G are connected to the lower bear-
ing temperature sensor and pin E is connected to
the pump ground; pin H is not connected.
If one temperature sensor is disconnected, the
pump will not start. To prevent damage to the
pump when the temperature exceeds 60e C, the
sensor automatically cuts out the power supply.
33
TECHNICAL INFORMATION
87-900-914-01(F)

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Ce manuel est également adapté pour:

969-9084 sérieTurbo-v 2000ht

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