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For ConFlat flange connections we recommend
using Varian hardware. Other hardware can be
used if it satisfies to this specifications:
− stainless steel screws
− minimum strength point of 500 N/mm
− length: 63.5 mm (2.5 inches).
To facilitate assembly and dismantling, apply Fel-
pro C-100 high temperature lubricant to the screw
threads protruding from the flange and between
the nuts and flange.
! ! ! !
Exercise care when tightening nuts and bolts to
avoid creating dents in the envelope as this may
cause the pump rotor to lock.
Connection B - FORE-VACUUM PUMP
A flange KF 40 NW is available to connect the Tur-
bopump to the fore-vacuum pump. A hose or vac-
uum approved pipe can be used. If a rigid pipe is
used, any vibration generated by the mechanical
pump must be eliminated through the use of bel-
lows.
NOTE
The Turbo pump is characterized by its high com-
pression ratio also for oil vapors. When using a
mechanical oil-sealed pump, it is advisable to in-
stall a suitable trap between the turbopump and the
fore-vacuum pump in order to prevent oil back-
streaming.
2
CAUTION
Connection C - ELECTRICAL
The turbopump is connected to the controller
through an 8-pin connector. Pins B, C and D are
the 3-phase supply to the motor, pins A and F are
connected to the upper bearing temperature sen-
sor, pins A and G are connected to the lower bear-
ing temperature sensor and pin E is connected to
the pump ground; pin H is not connected.
If one temperature sensor is disconnected, the
pump will not start. To prevent damage to the
pump when the temperature exceeds 60f C, the
sensor automatically cuts out the power supply.
33
TECHNICAL INFORMATION
87-900-969-01
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