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Ensure that the pump is suitable for your application. The
pump is designed for PVD system pumping applications or
clean general vacuum applications. Contact Varian Vacuum
Technologies or your supplier if you want to use the pump on
any other application.
Do not install or use the pump in an environment exposed to
atmospheric agents (rain, snow, ice), dust, aggressive gases,
or in explosive environments or those with a high fire risk.
NO!
! ! ! !
WARNING!
To avoid injury, never put fingers or any objects whatso-
ever in the inlet port of the turbopump. The use of the pro-
tective screen is strongly advised (optional extra). If a
vibration damper or flexible metallic bellows are used on
the inlet port, make sure that the pump is fixed to the base.
During operation, the following environmental conditions must
be respected:
−
maximum pressure: 2 bar above atmospheric pressure
−
temperature: from +5 JC to +35 JC
−
relative humidity: 0 - 95% (non-condensing)
In the presence of magnetic fields the pump must be protected
using a ferromagnetic shield. See the appendix "Technical In-
formation" for detailed information.The Turbo - V 2000HT se-
ries pumps must only be used with one of the special Varian
controllers (series 969-9462, 969-9562) and must be con-
nected to a primary pump (see "Technical Information").
The turbopump can be installed in any position.
! ! ! !
WARNING!
The power level to the pump must be set according to the
pumped gas. It is possible to select AIR or ARGON by means
of the controller (see the relevant instruction manual). Please
contact Varian if you want to use the pump with other gas
types.
Fix the turbopump in a stable position connecting the inlet
flange of the turbopump to a fixed counter-flange capable of
withstanding a torque of 30000 Nm around its axis.
The turbopump with ISOF inlet flange must be fixed to the vac-
uum chamber by means of 12 M10 bolts with a strength class
at least of 8.8 (σ
= 800 N/mm
r
suggested.
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Varian hard-
ware. See the appendix "Technical Information" for a detailed
description.
For installation of optional accessories, see "Technical
Information".
2
). A fixing torque of 22 Nm is
USE
All the instructions for the correct use of the turbopump are
contained in the control unit manual.
Read the manual carefully before using the pump.
In order to achieve a better (lower) base pressure, the pump
casing may be heated using the optional heater. While heating
the pump, the temperature of its inlet flange must not exceed
120 JC. Always use the water cooling system during the heat-
ing operations.
! ! ! !
Do not touch the turbopump or any of its accessories during
the heating process. The high temperatures may cause burns.
Use air or inert gas free from dust or particles for venting the
pump. The pressure at the vent port must be less than 2 bar
(above atmospheric pressure).
Avoid impacts, oscillations or harsh movements of the pump
when in operation. The bearings may become damaged.
For pumping aggressive gases, these pumps are fitted with a
special port to allow a steady flow of inert gas (like N
pump bearing protection (see the appendix "Technical Informa-
tion").
! ! ! !
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for
each gas disposal.
Do not use the pump in presence of explosive gases.
MAINTENANCE
The Turbo-V 2000HT series pump does not require any main-
tenance. Any work performed on the pump must be carried out
by authorized personnel.
! ! ! !
Before carrying out any work on the turbopump, disconnect it
from the supply, vent the pump by opening the appropriate
valve, wait until the rotor has stopped turning and wait until the
surface temperature of the pump falls below 50 JC.
In the case of breakdown, contact your local Varian service
center who can supply a reconditioned pump to replace that
broken down.
Before returning the pump to the constructor for repairs, or re-
placement with a reconditioned unit, the "Health and Safety"
sheet attached to this instruction manual must be filled-in and
sent to the local sales office. A copy of the sheet must be in-
serted in the pump package before shipping.
If a pump is to be scrapped, it must be disposed of in accor-
dance with the specific national standards.
24
INSTRUCTIONS FOR USE
WARNING!
! ! ! !
CAUTION
! ! ! !
CAUTION
WARNING!
WARNING!
NOTE
87-900-969-01
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2
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