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Do not install or use the pump in an environment exposed to at-
mospheric agents (rain, snow, ice), dust, aggressive gases, or in
explosive environments or those with a high fire risk.
NO!
!
WARNING!
To avoid injury, never put fingers or any objects whatsoever in
the inlet port of the turbopump. The use of the protective
screen is strongly advised (optional extra). If a vibration
damper or flexible metallic bellows are used on the inlet port,
make sure that the pump is fixed to the base.
During operation, the following environmental conditions must be
respected:
−
maximum pressure: 2 bar above atmospheric pressure
−
temperature: from +5 JC to +35 JC
−
relative humidity: 0 - 95% (non-condensing)
In the presence of magnetic fields the pump must be protected
using a ferromagnetic shield. See the appendix "Technical Infor-
mation" for detailed information.The Turbo - V 2000HT series
pumps must only be used with one of the special Varian control-
lers (series 969-9462, 969-9562) and must be connected to a
primary pump (see "Technical Information").
The turbopump can be installed in any position.
!
WARNING!
The power level to the pump must be set according to the pumped
gas. It is possible to select AIR or ARGON by means of the con-
troller (see the relevant instruction manual). Please contact Varian
if you want to use the pump with other gas types.
Fix the turbopump in a stable position connecting the inlet flange
of the turbopump to a fixed counter-flange capable of withstanding
a torque of 20.000 Nm around its axis.
The turbopump with ISO inlet flange must be fixed to the vacuum
chamber by means of clamps or claws. The following table shows,
for each flange and fixing device, the necessary number of clamps
or claws and the relevant fixing torque.
FLANGE
FIXING
DEVICE
ISO 250
M10 clamps
M10 claws
The turbopump with ConFlat inlet flange must be fixed to the vac-
uum chamber by means of the appropriate Varian hardware. See
the appendix "Technical Information" for a detailed description.
For installation of optional accessories, see "Technical Informa-
tion".
N.
FIXING TORQUE
12
22 Nm
12
22 Nm
24
INSTRUCTIONS FOR USE
USE
All the instructions for the correct use of the turbopump are con-
tained in the control unit manual.
Read the manual carefully before using the pump.
In order to achieve a better (lower) base pressure, the pump cas-
ing may be heated using the optional heater. While heating the
pump, the temperature of its inlet flange must not exceed 120 JC.
Always use the water cooling system during the heating opera-
tions.
!
WARNING!
Do not touch the turbopump or any of its accessories during the
heating process. The high temperatures may cause burns.
!
Use air or inert gas free from dust or particles for venting the
pump. The pressure at the vent port must be less than 2 bar
(above atmospheric pressure).
Avoid impacts, oscillations or harsh movements of the pump when
in operation. The bearings may become damaged.
!
For pumping aggressive gases, these pumps are fitted with a spe-
cial port to allow a steady flow of inert gas (like N
bearing protection (see the appendix "Technical Information").
!
WARNING!
When employing the pump for pumping toxic, flammable, or ra-
dioactive gases, please follow the required procedures for each
gas disposal.
Do not use the pump in presence of explosive gases.
MAINTENANCE
The Turbo-V 2000HT series pump does not require any mainte-
nance. Any work performed on the pump must be carried out by
authorized personnel.
!
WARNING!
Before carrying out any work on the turbopump, disconnect it from
the supply, vent the pump by opening the appropriate valve, wait
until the rotor has stopped turning and wait until the surface tem-
perature of the pump falls below 50 JC.
In the case of breakdown, contact your local Varian service center
who can supply a reconditioned pump to replace that broken
down.
NOTE
Before returning the pump to the constructor for repairs, or re-
placement with a reconditioned unit, the "Health and Safety"
sheet attached to this instruction manual must be filled-in and
sent to the local sales office. A copy of the sheet must be in-
serted in the pump package before shipping.
If a pump is to be scrapped, it must be disposed of in accordance
with the specific national standards.
CAUTION
CAUTION
, Ar) for pump
2
87-900-914-01(F)
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