Technical Information; Description Of The Turbopump - Varian 969-9085 Série Mode D'emploi

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Table des Matières

DESCRIPTION OF THE TURBOPUMP

The Turbo-V2000HT pump is available in two ver-

sions which differ only in their inlet flange.

They are:

− Model 969-9084 with ConFlat 12î external di-

ameter high vacuum flange

− Model 969-9085 with ISO 250 high vacuum

flange

Model 969-9084

Model 969-9085

The Turbo-V2000HT pump consists of a high fre-

quency motor driving a turbine fitted with 8 bladed

stages and 4 Macrotorr stages. The turbine rotates

in an anticlockwise direction when viewed from the

high vacuum flange end.

The turbine is made of high-strength, light alumin-

ium alloy, and is machined from a single block of

aluminium. The turbine stages have seven differ-

ent angles, from 44° to 16°, while the Macrotorr

stages are in form of discs.

The turbine rotor is supported by permanently lu-

bricated high precision ceramic ball bearings in-

stalled on the forevacuum side of the pump.

The static blades of the stator are made of stain-

less steel with five different blade angles from 44e

to 16e. These are supported and accurately posi-

tioned by spacer rings.

The Macrotorr stators are in the form of self-

positioning machined discs with pumping channels

and an opening restricted by the corresponding

rotor discs. These are made of aluminium alloy.

During normal operation, the motor is fed with a

voltage of 120 Vac three-phase at 550 Hz. To re-

duce losses during start-up to a minimum, the fre-

quency increases according to a ramp with a

higher initial voltage/frequency ratio.

A water cooling kit is available to cool down the

pump in the case where it is used under heavy

load or when the ambient temperature is insuffi-

cient for cooling purposes.

Two thermistor sensors are mounted near the

bearings to prevent the pump from overheating.

The thermistor sensors, the motor stator windings

and the earth are connected to a Turbo-V control-

ler through a 8 pin socket on the side of the pump.

The pump is balanced after assembly with a re-

sidual vibration amplitude less than 0.01 µm.

The pump can operate in any position and can be

supported on the high vacuum flange or on its

base. The connection of the forevacuum on the

side of the pump is a KF 40 flange.