Technical Information; Description Of The Dryvar 150; Turbopump Description - Varian DRYVAR 150 Notice De Mode D'emploi

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Table Des Matières

Table des Matières

DESCRIPTION OF THE DRYVAR 150

The DRYVAR 150 pumping system consists of a

pump with an integrated controller and a forepump

and is available in four models which differ only in

the high vacuum flange.

The four models are:

− Model 969-9160 with ConFlat 6" external di-

ameter high vacuum flange;

− Model 969-9161 with ISO 100 high vacuum

flange;

− Model 969-9162 with ConFlat 4.5" external di-

ameter high vacuum flange;

− Model 969-9163 with ISO 63 high vacuum

flange.

The following figures show the four models.

Turbopump Description

The turbopump consists of a high frequency motor

driving a turbine fitted with 8 bladed stages and 6

Macrotorr stages. The turbine rotates in an anti-

clockwise direction when viewed from the high

vacuum flange end.

The turbine is made of high-strength aluminium al-

loy, machined from a single block.

Proceeding from the high vacuum to the for vac-

uum region, the turbine stages sequence is:

1 stage with a blade angle of 42°, 1 stage with a

blade angle of 28°, 3 stages with a blade angle of

20°, and 3 final stages with a blade angle of 10°.

The Macrotorr stages are in the form of six discs.

The turbine rotor is supported by permanently lu-

bricated high precision ceramic ball bearings in-

stalled on the forevacuum side of the pump.

The static blades of the stator are made of

stainless steel. These are supported and accu-

rately positioned by spacer rings.

The Macrotorr stators are in the form of self-

positioning machined discs with pumping channels

and an opening restricted by the corresponding ro-

tor discs. These are made of aluminium alloy.

During normal operation, the motor is fed with a

voltage of 120 Vac three-phase at 1050 Hz. To re-

duce losses during start-up to a minimum, the fre-

quency increases according to a ramp with a

higher initial voltage/frequency ratio.

The pump is cooled by means of the integrated

fan. A thermistor sensor is mounted near the lower

bearing to prevent the pump from overheating.

The pump is balanced after assembly with a resid-

ual vibration amplitude less than 0.01 µm.

The pump can operate in any position and can be

supported on the high vacuum flange.

Model 969-9160

Model 969-9161

Model 969-9162

Model 969-9163