Technical Information; Description Of The Turbopump - Varian 969-9010 Serie Mode D'emploi

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DESCRIPTION OF THE TURBOPUMP

The Turbo-V250SF pump is available in two ver-
sions. The difference between the two versions lies
purely in the high vacuum connection. The two
versions are:
− Model 969-9009
with ISO 100 high vacuum flange
− Model 969-9010
with ConFlat 6î external diameter high vacuum
flange
Model 969-9009
The Turbo-V250SF pump is equipped with an up-
per inlet port and a side port and is foreseen for
applications where a double port is necessary
(multi-chamber systems).
The Turbo-V250SF pump consists of a high fre-
quency motor driving a turbine fitted with 5 bladed
stages and 3 Macrotorr stages. The turbine rotates
in an anticlockwise direction when viewed from the
high vacuum flange end.
The turbine is made of high-strength, light alumin-
ium alloy, and is machined from a single block of
aluminium. The turbine blades have two different
angles, 16° and 20°, while the Macrotorr stages
are in form of discs.
The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are fabricated in
stainless steel. These are supported and accu-
rately positioned by spacer rings.
The Macrotorr stators are in the form of self-
positioning machined discs with pumping channels
and an opening restricted by the corresponding ro-
tor discs. These are made of aluminium alloy.
Model 969-9010
25

TECHNICAL INFORMATION

During normal operation, the motor functions with a
power feed at 58 Vac three-phase at 933 Hz. To
reduce losses during start-up to a minimum, the
frequency increases according to a ramp with a
higher initial voltage/frequency ratio.
The external body of the pump is fitted with fins
which allow the pump itself to function with natural
convection air cooling. Kits are available for water
cooling or forced air cooling to cool the pump in the
cases where it is used under heavy load or when
natural convection is insufficient for cooling pur-
poses.
A thermistor sensor is mounted near the upper
bearing to prevent the pump from overheating.
The thermistor sensor, the motor stator windings
and the earth are connected to a Turbo-V control-
ler through a 6 pin socket on the side of the pump.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01 µm.
The pump can operate in any position and can be
supported on the high vacuum flange or on its
base. The connection of the forevacuum on the
side of the pump is a KF 16 NW flange.
87-900-881-01(B)

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969-9009 sérieTurbo-v250sf

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