Table des Matières
Publicité
GENERAL INFORMATION
This equipment is destined for use by professionals. The user
should read this instruction manual and any other additional in-
formation supplied by Varian before operating the equipment. Var-
ian will not be held responsible for any events occurring due to
non-compliance, even partial, with these instructions, improper
use by untrained persons, non-authorized interference with the
equipment or any action contrary to that provided for by specific
national standards.
The Turbo-V 2000HT series pumps are turbo-molecular pumps
for high and ultra-high vacuum applications and can pump any
type of gas or gas compound. They are not suitable for pumping
liquids or solid particles. The pumping action is obtained through a
high speed turbine (max. 33000 rpm) driven by a high-
performance 3-phase electric motor. The Turbo-V 2000HT pumps
are free of contaminating agents and, therefore, are suitable for
applications requiring a "clean" vacuum.
The following paragraphs contain all the information necessary to
guarantee the safety of the operator when using the equipment.
Detailed information is supplied in the appendix "Technical
Information".
This manual uses the following standard protocol:
!
WARNING!
The warning messages are for attracting the attention of the op-
erator to a particular procedure or practice which, if not followed
correctly, could lead to serious injury.
!
The caution messages are displayed before procedures which, if
not followed, could cause damage to the equipment.
NOTE
The notes contain important information taken from the text.
STORAGE
In order to guarantee the maximum level of performance and reli-
ability of Varian Turbomolecular pumps, the following guidelines
must be followed:
•
when shipping, moving and storing pumps, the following en-
vironmental specifications should not be exceeded:
•
temperature range: -20 JC to 70 JC
•
relative humidity range: 0 to 95% (non condensing)
•
the turbomolecular pumps must be always soft-started when
received and operated for the first time by the customer
•
the shelf life of a turbomolecular pump is 10 months from the
shipping date.
!
If for any reason the shelf life time is exceeded, the pump has to
be returned to the factory. Please contact the local Varian Vacuum
Sales and Service representative for informations.
PREPARATION FOR INSTALLATION
The pump is supplied in a special protective packing. If this shows
signs of damage which may have occurred during transport, con-
tact your local sales office.
When unpacking the pump, be sure not to drop it and avoid any
kind of sudden impact or shock vibration to it.
Do not dispose of the packing materials in an unauthorized man-
ner. The material is 100% recyclable and complies with EEC Di-
rective 85/399.
CAUTION
CAUTION
In order to prevent outgassing problems, do not use bare hands to
handle components which will be exposed to vacuum. Always use
gloves or other appropriate protection.
Normal exposure to the environment cannot damage the pump.
Nevertheless, it is advisable to keep it closed until it is installed in
the system, thus preventing any form of pollution by dust.
INSTALLATION
!
Cause its weight, the pump must be handled by means of suitable
moving and handling tools.
Use the suitable handling kit eyebolts screwing them into the M8
holes of the pump envelope.
Ensure that the pump is suitable for your application. The pump is
designed for PVD system pumping applications or clean general
vacuum applications. Contact Varian Vacuum Technologies or
your supplier if you want to use the pump on any other application.
Do not remove the adhesive and protective cap before connect-
ing the turbopump to the system.
23
INSTRUCTIONS FOR USE
!
CAUTION
NOTE
WARNING!
!
CAUTION!
87-900-914-01(F)
Publicité
Table des Matières
