Table des Matières
Publicité
GENERAL INFORMATION
This equipment is destined for use by professionals. The user
should read this instruction manual and any other additional in-
formation supplied by Varian before operating the equipment.
Varian will not be held responsible for any events occurring due to
non-compliance, even partial, with these instructions, improper
use by untrained persons, non-authorized interference with the
equipment or any action contrary to that provided for by specific
national standards.
The Turbo-V 70 series pumps are turbo-molecular pumps for high
and ultra-high vacuum applications and can pump any type of gas
or gas compound. They are not suitable for pumping liquids or
solid particles. The pumping action is obtained through a high
speed turbine (max. 75000 rpm) driven by a high-performance 3-
phase electric motor. The Turbo-V 70 pumps are free of contami-
nating agents and, therefore, are suitable for applications requiring
a "clean" vacuum.
The following paragraphs contain all the information necessary to
guarantee the safety of the operator when using the equipment.
Detailed information is supplied in the appendix "Technical Infor-
mation".
This manual uses the following standard protocol:
!
WARNING!
The warning messages are for attracting the attention of the op-
erator to a particular procedure or practice which, if not followed
correctly, could lead to serious injury.
!
The caution messages are displayed before procedures which, if
not followed, could cause damage to the equipment.
NOTE
The notes contain important information taken from the text.
STORAGE
In order to guarantee the maximum level of performance and reli-
ability of Varian Turbomolecular pumps, the following guidelines
must be followed:
•
when shipping, moving and storing pumps, the following
environmental specifications should not be exceeded:
•
temperature range: -20 KC to 70 KC
•
relative humidity range: 0 to 95% (non condensing)
•
the turbomolecular pumps must be always soft-started when
received and operated for the first time by the customer
•
the shelf life of a turbomolecular pump is 10 months from the
shipping date.
!
If for any reason the shelf life time is exceeded, the pump has to
be returned to the factory. Please contact the local Varian Vacuum
Sales and Service representative for informations.
PREPARATION FOR INSTALLATION
The pump is supplied in a special protective packing. If this shows
signs of damage which may have occurred during transport, con-
tact your local sales office.
When unpacking the pump, be sure not to drop it and avoid any
kind of sudden impact or shock vibration to it.
Do not dispose of the packing materials in an unauthorized man-
ner. The material is 100% recyclable and complies with EEC
Directive 85/399.
CAUTION
CAUTION
In order to prevent outgassing problems, do not use bare hands to
handle components which will be exposed to vacuum. Always use
gloves or other appropriate protection.
Normal exposure to the environment cannot damage the pump.
Nevertheless, it is advisable to keep it closed until it is installed in
the system, thus preventing any form of pollution by dust.
INSTALLATION
Do not install or use the pump in an environment exposed to at-
mospheric agents (rain, snow, ice), dust, aggressive gases, or in
explosive environments or those with a high fire risk. During op-
eration, the following environmental conditions must be respected:
−
maximum pressure: 2 bar
−
temperature: from +5 KC to +35 KC
−
relative humidity: 0 - 95% (non-condensing)
The Turbo-V 70 series pumps must only be used with one of the
special Varian controllers (series 969-9405, 969-9505, 969-9507
or 969-9508) and must be connected to a primary pump (see
"Technical Information").
Do not remove the adhesive and protective cap before connect-
ing the turbopump to the system.
23
INSTRUCTIONS FOR USE
!
CAUTION
NOTE
!
CAUTION!
87-900-860-01(E)
Publicité
Table des Matières
