Instructions For Use - Varian Mini-TASK 969-9170 Notice De Mode D'emploi

Table des Matières

Publicité

INSTRUCTIONS FOR USE

Safety Guideline
for
Turbomolecular Pumps
Turbomolecular pumps as described in the following operating manual contain a large
amount of kinetic energy due to the high rotational speed in combination with the specific
mass of their rotors.
In case of a malfunction of the system for example rotor/stator contact or even a rotor crash
the rotational energy may be released.
WARNING!
To avoid damage to equipment and to prevent injuries to operating
personnel the installation instructions as given in this manual should be
strictly followed!
49
87-900-962-01(A)

Publicité

Table des Matières
loading

Ce manuel est également adapté pour:

Mini-task 969-9171Mini-task 969-9172

Table des Matières