Technical Information; Description Of The Turbopump - Varian Turbo-V300 ICE Mode D'emploi

DESCRIPTION OF THE TURBOPUMP

The Turbo-V300 ICE pump is available in four ver-
sions which differ only in their inlet flange. They are:
− Model 969-9076 with ISO 100 high vacuum flange
− Model 969-9083 with ISO 160 high vacuum flange
− Model 969-9095 with CFF 6î high vacuum flange
− Model 969-9096 with CFF 8î high vacuum flange.
Model 969-9076
Model 969-9083
Model 969-9095
Model 969-9096
The Turbo-V300 ICE pump consists of a high fre-
quency motor driving a turbine fitted with 8 bladed
stages and 3 Macrotorr stages. The turbine rotates
in an anticlockwise direction when viewed from the
high vacuum flange end.
The turbine is made of high-strength, light alumin-
ium alloy, and is machined from a single block of
aluminium. The turbine blades have five different
angles, from 42° to 10°, while the Macrotorr stages
are in form of discs.
The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are made of
stainless steel. These are supported and accu-
rately positioned by spacer rings.
The Macrotorr stators are in the form of self-
positioning machined discs with pumping channels
and an opening restricted by the corresponding ro-
tor discs. These are made of aluminium alloy.
The Spiral Seal is a dynamic seal based on a
Siegbahn disk that increases the protection of the
bearings against corrosive gases.
The aluminium parts are protected against corro-
sion caused by chlorinated and fluorinated gases
by means of a protective film. The film (called Ar-
morr Coating) is deposited by means of a vacuum
process allowing an uniformity of the coating thick-
ness with no impact on the pump balance.
During normal operation, the motor is fed with a
voltage of 90 Vac three-phase at 933 Hz. To re-
duce losses during start-up to a minimum, the fre-
quency increases according to a ramp with a
higher initial voltage/frequency ratio.
The external body of the pump is shaped so that
the pump can function with natural convection air
cooling. A water cooling kits is available to cool the
pump in the cases where it is used under heavy
load or when natural convection is insufficient for
cooling purposes.
A thermistor sensor is mounted near the upper
bearing to prevent the pump from overheating. The
thermistor sensor, the motor stator windings and
the earth are connected to a Turbo-V controller
through a 6 pin socket on the side of the pump.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01 µm.
The pump can operate in any position and can be
supported on the high vacuum flange or on its
base. The connection of the forevacuum on the
side of the pump is a KF 25 NW flange.
25

TECHNICAL INFORMATION

87-900-897-01(C)