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TECHNICAL SPECIFICATION
Pumping speed (l/s)
With CF 4.5" or
He: 60 l/s
Compression ratio
Base pressure*
with recommended mechanical fore
pump:
2 x 10
with recommended diaphragm fore pump:
2 x 10
Inlet flange
CF 4.5" O.D.
ISO63
CF 2.75" O.D.
KF 40 NW
Foreline flange
KF 16 NW
Rotational speed
75000 RPM
Start-up time
< 60 seconds
Recommended
mechanical: Varian DS102
forepump
diaphragm: Varian SH100
Operating position
any
Cooling
Natural air convection
requirements
Forced air or water optional
With CF 2.75" or
ISO 63:
KF 40 NW:
N
: 68 l/s
N
: 45 l/s
2
2
He: 50 l/s
H
: 45 l/s
H
: 41 l/s
2
2
8
N
: 5 x 10
2
4
He: 8 x 10
4
H
: 7 x 10
2
-10
-10
mbar (1.5 x 10
Torr)
-9
-9
mbar (1.5 x 10
Torr)
Operating ambient
temperature
Coolant water
Bakeout
temperature
Vibration level
(displacement)
Noise level
Input
Lubricant
Installation category
Pollution degree
Storage
temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base pres-
sure is that measured in a leak-free test dome, 48
hours after the completion of test dome bake-out,
with a Turbopump fitted with a ConFlat flange and
using the recommended pre-vacuum pump.
53
TECHNICAL INFORMATION
+ 5° C to + 35° C
flow: 10 l/h (0.05 GPM)
temperature: + 10° C to + 30° C
pressure: 2 to 4 bar (30 to 60 Psi)
120° C at inlet flange max. (CF
flange)
80° C at inlet flange max. (ISO
flange)
< 0.01 μm at inlet flange
45 dB (A) at 1 meter
54 Vac, three phase, 1250 Hz
permanent lubrication
II
2
- 20° C to + 70° C
ISO: 1.7 (4)
CFF: 2.5 (4)
87-900-862-01(G)
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