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TECHNICAL SPECIFICATION
The following figure shows the Turbo-V300HT outline drawing. The dimensions are in inches [mm].
Pumping speed
With CFF 8" or
ISO 160:
N
: 280 l/s
2
He: 230 l/s
H
: 210 l/s
2
Compression ra-
tio
Base pressure*
with recommended mechanical forepump:
< 2 x 10
with recommended diaphragm forepump:
-8
2 x 10
Inlet flange
CFF 8" O.D.
ISO 160
CFF 6" O.D.
ISO 100
Foreline flange
KF 25 NW
Rotational speed
56000 RPM
Start-up time
< 3 minutes
Recommended
mechanical: Varian SD 300
forepump
diaphragm: Varian MD 60
Operating
any
position
Cooling
Natural air convection
requirements
Forced air or water optional
With CFF 6" or ISO
100:
N
: 250 l/s
2
He: 220 l/s
H
: 220 l/s
2
8
N
: >2 x 10
2
5
He: 1 x 10
4
H
: 2 x 10
2
-10
-10
mbar (< 1.5 x 10
Torr)
-8
mbar (1.5 x 10
Torr)
Operating ambient
temperature
Coolant water
Bakeout
temperature
Vibration level
(displacement)
Noise level
Input
Lubricant
Storage
temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump.
26
TECHNICAL INFORMATION
+ 5° C to + 35° C
flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 5 bar (45 to 75 Psi)
120° C at inlet flange max. (CF flange)
80° C at inlet flange max. (ISO flange)
< 0.01 µm at inlet flange
≤ 45 dB (A) at 1 meter
90 Vac, three phase, 933 Hz
permanent lubrication
- 20° C to + 70° C
ISO 100 and 160: 4.5 (10)
CFF 6" and 8": 8 (17.6)
87-900-875-01(C)
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