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WARNING!
When employing the pump for pumping toxic, flammable, or radioactive
gases, please follow the required procedures for each gas disposal. Do not
use the pump in presence of explosive gases. The pump is designed to pump
high throughput of N
heavier than Ar, please contact Agilent technical support for information.
Use of Turbo-V 3K-G
How to Start the System up
Before starting the system, please check that the mating I/O
connector is unplugged. If the system is connected to a remote I/O,
make sure the stop signal (see para. "J1-REMOTE I/O" of annex
"Technical Information") is given.
To start the system please follow the following steps:
1
2
3
4
Turbo-V 3K-G Pumping System User Manual / 87-901-011-01 (D)
, Ar and lighter gas. Should you need to pump gases
2
unplug (if present) the system mating I/O connector
plug on the mains
pump the vacuum chamber down to 0.1 mbar
give the Turbo-V 3K-G a start signal by one of the following
methods:
a
connecting the provided mating I/O connector
b
giving a remote start signal through the I/O connector (see
para. "J1-REMOTE I/O" of annex "Technical Information")
c
giving a remote start signal via the serial RS 232/485
interface (see para. "RS232/RS 485 Communication
Description" of annex "Technical Information").
Instructions for Use
Use
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Chapitres
