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The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are made of
stainless steel. These are supported and accu-
rately positioned by spacer rings.
The Macrotorr stators are in the form of self-
positioning machined discs with pumping channels
and an opening restricted by the corresponding ro-
tor discs. These are made of aluminium alloy.
During normal operation, the motor is fed with a
voltage of 120 Vac three-phase at 1050 Hz. To re-
duce losses during start-up to a minimum, the fre-
quency increases according to a ramp with a
higher initial voltage/frequency ratio.
The pump is cooled by means of the integrated fan.
An external optional fan is available to cool the
pump in the cases where it is used under heavy
load.
A thermistor sensor is mounted near the lower
bearing to prevent the pump from overheating.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01 µm.
The pump can operate in any position and can be
supported on the high vacuum flange. The connec-
tion of the forevacuum on the side of the pump is a
KF 16 NW flange.
Controller Description
The integrated controller is a solid-state frequency
converter which is driven by a single chip micro-
computer and is composed of a PCB which in-
cludes power supply and 3-phase output, analog
and input/output section, microprocessor and digi-
tal section.
The power supply, together with the 3-phase out-
put, converts the single phase AC mains supply
into a 3-phase, low voltage, medium frequency
output which is required to power the pump.
The controller can be operated by a remote host
computer via the serial connection.
TECHNICAL SPECIFICATION
Pumping speed (with inlet
screen)
N
2
He:
H
2
Compression ratio
Base pressure
(According to standard DIN
28 428, the base pressure
is that measured in a leak-
free test dome, 48 hours
after the completion of test
dome bake-out, with a
Turbopump fitted with a
ConFlat flange and using
the recommended pre-
vacuum pump)
Inlet flange
Foreline flange
Rotational speed
Start-up time
Recommended
forepump
Operating position
Operating ambient
temperature
(see the following note)
Bakeout temperature
Vibration level
(displacement)
Lubricant
Input power supply:
Voltage:
Frequency:
Max input power:
Stand-by power:
Max operating
power:
Protection fuse
26
TECHNICAL INFORMATION
ISO 100:
ISO 63:
:
125 l/s
105 l/s
120 l/s
107 l/s
:
100 l/s
100 l/s
8
N
: 3 x 10
2
5
He: 8 x 10
4
H
: 8 x 10
2
with minimum recommended
mechanical pump:
-10
< 2 x 10
mbar
-10
(< 2 x 10
with minimum recommended
diaphragm pump:
-8
2 x 10
mbar
-8
(2 x 10
torr)
ISO 100, ISO 63, CFF 6",
CFF 4.5î
KF 16 NW
62000 rpm
< 90 seconds
Mechanical: Varian SD 40
Diaphragm: MD12
Any
See the following diagram
120i C at inlet flange max.
< 0.01 µm at inlet flange
permanent lubrication
90 to 132 Vac (for models
969-9392 to 969-9395)
180 to 264 Vac (for models
969-9388 to 969-9391)
47 to 63 Hz
180 W at 230 Vac
15 W at 230 Vac
90 W at 230 Vac
1 x 3.15 A
87-900-924-01(B)
Torr)
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