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ISTRUZIONI ORIGINALI
GENERAL INFORMATION
This
equipment
is
professionals. The user should read this instruction
manual and any other additional information
supplied
by
Varian
equipment. Varian will not be held responsible for
any events occurring due to non-compliance, even
partial, with these instructions, improper use by
untrained persons, non-authorized interference
with the equipment or any action contrary to that
provided for by specific national standards.
The TPS-mobile is an integrated system with a
turbo-molecular pump for high and ultra-high
vacuum applications associated with its relevant
controller and its primary pump. The system can
pump any type of gas or gas compound. It is not
suitable for pumping liquids or solid particles.
The pumping action is obtained through a high
speed turbine driven by a high-performance 3-
phase electric motor.
The
following
paragraphs
information necessary to guarantee the safety of
the operator when using the equipment. Detailed
information is supplied in the appendix "Technical
Information".
This manual uses the following standard
protocol:
WARNING!
The warning messages are for attracting the
attention of the operator to a particular procedure
or practice which, if not followed correctly, could
lead to serious injury.
The caution messages are displayed before
procedures which, if not followed, could cause
damage to the equipment.
NOTE
The notes contain important information taken
from the text.
STORAGE
In order to guarantee the maximum level of
performance and reliability of Varian pumping
systems,
the
following
followed:
•
when shipping, moving and storing pumps, the
following environmental specifications should
not be exceeded:
•
temperature range: -20 °C to +70 °C
•
relative humidity range: 0 to 95% (non
condensing)
•
the turbomolecular pumps must be always
soft-started when received and operated for
the first time by the customer
•
the shelf life of a turbomolecular pump is 10
months from the shipping date.
destined
for
use
before
operating
the
contain
all
the
CAUTION
guidelines
must
by
If for any reason the shelf life time is exceeded, the
pumping system has to be returned to the factory.
Please contact the local Varian Vacuum Sales and
Service representative for informations.
PREPARATION FOR INSTALLATION
The TPS-mobile is supplied in a special protective
packing. If this shows signs of damage which may
have occurred during transport, contact your local
sales office.
When unpacking the system, be sure not to drop it
and avoid any kind of sudden impact or shock
vibration to it.
Do not dispose of the packing materials in an
unauthorized manner. The material is 100%
recyclable and complies with EEC Directive
85/399.
In order to prevent outgassing problems, do not
use bare hands to handle components which will
be exposed to vacuum. Always use gloves or other
appropriate protection.
Normal exposure to the environment cannot
damage the TPS-mobile. Nevertheless, it is
advisable to keep it closed until it is installed in the
system, thus preventing any form of pollution by
dust.
The models reported on this User Manual are
based on the Varian pumping system platform
named TPS-mobile, differences introduced by
different PNs are related to TMP and Forepump
integrated in the specific system and to the main
be
voltage applicable to the system.
The differences between the different TPS-mobile
PNs affect just systems performance, operation
and using procedure is the same for every TPS-
mobile.
The information reported is applicable to the entire
platform (all PNs) apart from specific TMP,
Forepump or main voltage.
82/105
INSTRUCTIONS FOR USE
CAUTION
CAUTION
NOTE
87-901-005-01(A)
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