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ISTRUZIONI ORIGINALI
INSTALLATION
Do not remove the adhesive and protective cap
before connecting the turbopump to the system.
Do not install or use the pumping system in an
environment exposed to atmospheric agents (rain,
snow, ice), dust, aggressive gases, or in explosive
environments or those with a high fire risk. During
operation, the following environmental conditions
must be respected:
− maximum pressure: 2 bar above atmospheric
pressure
− temperature: from +5 °C to +35 °C
− relative humidity: 0 - 95% (non-condensing)
In the presence of magnetic fields the pumping
system must be protected using a ferromagnetic
shield.
The TPS-mobile have to be placed on a flat floor.
Place the TPS-mobile in a stable position
connecting the inlet flange of the turbopump to a
counter-flange capable of withstanding a torque of
50 Nm around its axis (directly or by means of a
flexible hose).
The turbopump with ISO inlet flange must be
connected to the counter-flange by means of
clamps. The following table shows, for each fixing
device, the necessary number of clamps and the
relevant fixing torque.
FLANGE
FIXING DEVICE
ISO 63
M10 clamps
ISO 100 K
M10 clamps
ISO 160 K
M10 clamps
The turbopump with ConFlat inlet flange must be
fixed to the vacuum chamber by means of the
appropriate Varian hardware. See the appendix
"Technical Information" for a detailed description.
NOTE
The TPS-mobile cannot be fixed by means of its
base.
For installation of optional accessories, see
"Technical Information".
USE
This paragraph details the fundamental operating
procedures.
Make all electrical an pneumatic connections are
properly connected before the use of the system.
While
heating
the
temperature of the inlet flange must not exceed
120 °C.
CAUTION
FIXING
N.
TORQUE
4
22 Nm
4
22 Nm
4
22 Nm
vacuum
chamber,
the
Never use the pumping system when the turboinlet
flange is not connected to the vacuum chamber or
is not blanked.
Do not touch the turbopump or any of its
accessories during the heating process. The high
temperatures may cause burns.
Avoid impacts or harsh movements of the pump
when in operation. The bearings may become
damaged and damages to the persons or the
things could be taken place.
Use inert gas free from dust, particles or humidity
(like Nitrogen) for venting the pump. The pressure
at the vent port must be less than 2 bar (above
atmospheric pressure).
When employing the pump for pumping toxic,
flammable, or radioactive gases, please follow the
required procedures for each gas disposal.
Do not use the pumping system in presence of
explosive gases.
Switching on and Use of TPS-mobile
− After TPS-mobile unpacking, perform a brief
visual analysis of the system to be sure that no
sign of damages due to transportation is
present
(critical
Forepump fastening brackets, system front
panel and the system wheels).
− Check the system voltage on the Varian label
stuck on the system electronic units case.
− If the voltage provided by your electrical
supplier is compatible with the system voltage,
you can connect the provided power cord to the
83/105
INSTRUCTIONS FOR USE
WARNING!
WARNING!
WARNING!
CAUTION
WARNING!
parts
are:
TMP
flange,
Part Number (PN)
Serial Number (SN)
Electrical Data
87-901-005-01(A)
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