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3D Parameters
3D parameters are calculated across the image area. When
calculating 3D parameters, an evaluation area is determined by
removing an area around the outside edge of the image area equal
to the width of the discard length.
The 3D Parameter Menu allows the operator to select
3D analysis
parameters to be displayed by the gage (a maximum of 6 parameters
can be selected from the 2D and 3D Parameter lists).
H
(default) Average maximum peak-to-valley height:
the distance between the anvils minus the 2 mils (50.8 µm) of
incompressible film. When selected an optional linearization can be
performed by selecting the linearization checkbox in the Cal Settings
Menu (see pg. 12)
Spd
(default) Areal peak density: the number of peaks per unit
area (formerly known as Pd).
Sa
(default) Average roughness: the arithmetic average of the
absolute values of the measured height deviations from the mean
surface taken within the evaluation area.
Sq
Root mean square roughness: the root mean square average
of the measured height deviations from the mean surface taken within
the evaluation area.
Sz
Maximum area peak-to-valley height: the vertical distance
between the maximum peak height and the maximum valley depth.
Commonly referred to as St.
Sp
Maximum area peak height: the maximum height in the
evaluation area with respect to the mean surface.
Sv
Maximum valley depth: the absolute value of the minimum
height in the evaluation area with respect to the mean surface.

Filter Settings

To optimize the analysis for a specific application, filters may be
applied to the raw image to remove undesirable profile characteristics
prior to calculating the 2D and 3D parameters. The short wavelength
(λs) Gaussian filter attenuates features that have a wavelength
shorter than the selected size. The long wavelength cutoff (λc)
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