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Then screw the vent valve into the pump and
tighten it using a 16 mm hexagonal spanner with a
torque of 2.5 Nm.
Do not overtighten the valve as this may damage
the thread on the pump.
Then connect the cable from the valve to the suit-
able connector on the controller.
VIBRATION ISOLATOR INSTALLATION
Two vibration isolators for ISO and CFF inlet
flange version pumps are available as accesso-
ries.
The two model part numbers are the following:
− model 969-9375 for ISO 63 flange;
− model 969-9376 for CFF 4.5" flange.
They typically reduce the vibration transmitted
from the Turbo-V 81-M to the system by a factor of
20.
Please refer to the relevant instruction manual.
CAUTION
TYPICAL LAYOUT DIAGRAM
With Navigator Controller
1.
Turbo-V Navigator controller
2.
Vent valve
3.
Vacuum pump shut-off valve (optional)
4.
System vent valve (optional)
5.
Vacuum chamber
6.
Ionization gauge
7.
Fore-vacuum pump connecting flange
8.
Oil mist eliminator
9.
Fore-vacuum pump with internal one-way valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
13. Turbopump
14. Fan
15. Flexible connection
62
TECHNICAL INFORMATION
87-900-983-01(B)
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