Technical Specification - Agilent Technologies TwisTorr 305-IC Mode D'emploi

Technical Specification

Tab. 1
Pumping speed
N
2
He
H
2
Ar
Max gas flow rate (N2):
Note: value refer to water-cooling pump version with:
• water temperature between 15°C and 20°C (non condensing, refer to Figure 13)
• backing pump with pumping speed equal or above 5 m
Compression ratio
N
2
He
H
2
Ar
Max foreline pressure tolerance N2
Note: foreline Tolerance defined as the pressure at which the turbopump still produces a compression of 100.
For continuous operation, water cooling is recommended (water temperature between 15°C and 20°C).
Base pressure with recommended forepump
Inlet flange
Foreline flange
Max Rotation Speed
Start-up time
Recommended forepump
Operating position
TwisTorr 305-IC User Manual / 87-901-058-01
ISO 100/ CF 6" / ISO 160 / CF 8"
250 l/s
255 l/s
220 l/s
250 l/s
250 sccm
/h)
3
>1  10
11
>1  10
8
1.5  10
6
> 1  10
11
12 (mbar)
 1 x 10 mbar
-10
( 1 x 10 Torr)
-10
(According to standard DIN 28 428, the base pressure is
that measured in a leak-free test dome, 48 hours after the
completion of test dome bake-out, with a Turbopump fitted
with a ConFlat flange and using the recommended pre-
vacuum pump)
CFF 8" O.D.ISO 160
CFF 6" O.D.ISO 100
KF16 NW (KF25 – optional)
60600 rpm (1010 Hz driving frequency)
 3 minutes (it can be longer in case of soft start active)
Mechanical pump: DS102, DS302
Dry Pump IDP-3 (no gas flow), IDP-7, IDP10
Any
Technical Information

Technical Specification

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