Table des Matières
Publicité
1.
Close the corrosive gas flow into the system.
2.
Leaving the Turbo-V pump and the backing
pump running and the purge gas flowing, wait
for enough time to evacuate the corrosive gas
from the system.
3.
Turn off the Turbopump.
4.
Open the Turbo-V vent port slowly until to
reach atmospheric pressure in the system.
5.
When the Turbo-V pump and the backing
pump are stopped and the system is at at-
mospheric pressure, for a better bearing pro-
tection it is advisable to leave the purge gas
flowing into the Turbo-V pump, with the
chamber or the Turbo-V vent valve opened, to
avoid system overpressures. If the vent valve
can't be kept opened, the backing pump
should be left operating.
1. Purge gas line
2. Pressure regulator
3. Gas purge valve
4. Gas purge port
5. Forevacuum pump
6. Turbopump
7. Vent valve
Purge layout
PUMP USED IN PRESENCE OF MAGNETIC
FIELDS
Magnetic fields induce eddy currents in the rotor of
a turbomolecular pump that tend to oppose to its
rotation.
The result is increased electrical power consump-
tion by the motor, most of which is dissipated in
the rotor.
Since the rotor is not in contact with the stator the
above power can leave the rotor mainly by radia-
tion and hence the rotor may be overheated while
static parts of the pump remain cool.
This effect is strongly dependant from the inten-
sity, time function and distribution of the magnetic
field.
In general, therefore, an increase in pump current
can be expected.
If this increase is lower than 50% of the current
value drawn by the motor in high vacuum opera-
tion, no particular problem should be expected.
However if the effect is grater, than the case
should be carefully reviewed by Varian's specialist.
As a matter of fact, in case of high magnetic fields,
also important forces might be generated and ap-
plied to the rotor.
ACCESSORIES AND SPARE PARTS
DESCRIPTION
Mains cable NEMA Plug, 3m long
Mains cable European Plug, 3m
long
Serial cable and Navigator
Software
Inlet screen
Inlet screen DN 160
Inlet screen DN 200
Heater band, 220 V
Heater band, 120 V
Water cooling kit (plastic model)
Water cooling kit (metallic model)
Air cooling kit for Navigator
Controller
Air cooling kit for standard rack
controller
Bracket for Navigator Controller
side mounting
Vibration isolator, CF 6"
Vibration isolator, ISO 160
Vibration isolator, CF 8"
Vibration isolator, ISO 200
Vibration isolator, CF 10"
Vent flange, NW 10 KF / M8
Vent device with adjustable delay
time for standard rack controller
Vent valve for standard rack con-
troller
Vent valve for Navigator Controller
Purge valve with KF16 flange
Purge valve with 7/16" flange
Forepump DS 302, with 1 ph.,
universal motor
Triscroll Dry Vacuum Pump PTS
300 single phase, universal motor
Triscroll Dry Vacuum Pump PTS
300 3 phase, universal motor
74
TECHNICAL INFORMATION
PART NUMBER
969-9958
969-9957
969-9883
969-9302
969-9304
969-9316
969-9807
969-9808
969-9347
969-9337
969-9339
969-9314
969-9349
969-9334
969-9345
969-9335
969-9346
969-9336
969-9108
969-9831
969-9843
969-9834
969-9239
969-9240
949-9325
PTS03001UNIV
PTS03003UNIV
87-900-934-01(G)
Publicité
Table des Matières
