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Operation
In order to reach ultimate vacuum, the pump must be left
running for about one hour with the inlet sealed.
Unlike conventional oil-sealed pumps, Varian's dry scroll
pumps do not have fluid to cleanse them of accumulated
dust and debris. Run the pump periodically at atmosphere
for a minute or two to flush out the pump. Flush the pump
regularly and adjust this schedule according to your
specific conditions.
WARNING
During operation the outer surface
of the motor housing can become
hot. Avoid touching the motor hous-
ing during pump operaion.
Startup Procedure
1. Be sure that the vacuum system isolation valve is
closed.
2. Turn on power to the pump.
3. Open the isolation valve.
Shutdown Procedure
1. Close the vacuum system isolation valve.
This prevents debris in pump from being transported
into the vacuum system.
2. Turn off power to the pump.
4
TriScroll 300 Series Vacuum Pump
Maintenance
Personnel responsible for pump operation and
maintenance must be well-trained and aware of the
accident prevention rules.
WARNING
❑
Death may result from contact
with high voltages. Always take
extreme care and observe the acci-
dent prevention regulations in force.
❑
When the machine is powered
up, be careful of moving parts and
high voltages.
❑
If you have to perform mainte-
nance on the pump after a consider-
able time in operation, allow the
pump to cool as the temperature of
the outer surface may be in excess of
55 °C (131 °F).
❑
Always disconnect your power
supply to the pump before beginning
maintenance work.
NOTE
Before returning the pump to the
factory for repair, the "Health and
Safety" sheet attached to this instruc-
tion manual must be completed and
sent to the local sales office. A copy
of the sheet must be inserted in the
pump package before shipping.
If a pump is to be discarded, it must be disposed of in
accordance with specific national and local standards.
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