Varian 969-9069 Serie Mode D'emploi page 31

TECHNICAL SPECIFICATION
Pumping speed Main port:
N : 250 l/s
2
He: 180 l/s
H : 110 l/s
2
Total compres-
sion ratio
Base pressure* with recommended mechanical forepump:
< 2 x 10
with recommended diaphragm forepump:
-8
2 x 10
Inlet flange Main port: CFF 6" O.D., ISO 100
Side port: NW 40 KF
Foreline flange NW 25 KF
Rotational speed 56000 RPM
Start-up time < 3 minutes
Recommended mechanical: Varian SD 300
forepump diaphragm: Varian MD 60
Operating any
position
Cooling Natural air convection
requirements Forced air or water optional
Operating ambi- + 5° C to + 35° C
ent temperature
Side port:
N : 10 l/s
2
He: 10 l/s
H : 8 l/s
2
7
N : 1 x 10
2
3
He: 7 x 10
3
H : 2 x 10
2
-10 -10
mbar (1.5 x 10 Torr)
-8
mbar (1.5 x 10 Torr)
Coolant water flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 5 bar (45 to 75 Psi)
electrical conductivity: ≤ 500 µS/cm
Bakeout 120° C at inlet flange maximum
temperature (CF flange)
80° C at inlet flange maximum
(ISO flange)
Vibration level < 0.01 µm at inlet flange
(displacement)
Noise level ≤ 45 dB (A) at 1 meter
Input 90 Vac, three phase, 933 Hz
Lubricant permanent lubrication
Storage - 20° C to + 70° C
temperature
Weight kg (lbs) 10 (22)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump.
26
TECHNICAL INFORMATION
UPPER VIEW
BOTTOM VIEW
87-900-882-01(B)