Varian 969-9069 Serie Mode D'emploi page 30

DESCRIPTION OF THE TURBOPUMP
The Turbo-V300SF pump is available in two ver-
sions which differ only in their inlet flange.
They are:
− Model 969-9068 with ISO 100 high vacuum
flange
− Model 969-9069 with ConFlat 6" external di-
ameter high vacuum flange
The Turbo-V300SF pump is equipped with an up-
per inlet port and a side port and is foreseen for
applications where a double port is necessary
(multi-chamber systems).
Model 969-9068
Model 969-9069
The Turbo-V300SF pump consists of a high fre-
quency motor driving a turbine fitted with 5 bladed
stages and 3 Macrotorr stages. The turbine rotates
in an anticlockwise direction when viewed from the
high vacuum flange end.
The turbine is made of high-strength, light alumin-
ium alloy, and is machined from a single block of
aluminium. The turbine blades have two different
angles, 16° and 20°, while the Macrotorr stages
are in form of discs.
The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are made of
stainless steel. These are supported and accu-
rately positioned by spacer rings.
The Macrotorr stators are in the form of self-
positioning machined discs with pumping channels
and an opening restricted by the corresponding ro-
tor discs. These are made of aluminium alloy.
During normal operation, the motor is fed with a
voltage of 90 Vac three-phase at 933 Hz. To re-
duce losses during start-up to a minimum, the fre-
quency increases according to a ramp with a
higher initial voltage/frequency ratio.
The external body of the pump is shaped so that
the pump can function with natural convection air
cooling. Kits are available for water cooling or
forced air cooling to cool the pump in the cases
where it is used under heavy load or when natural
convection is insufficient for cooling purposes.
A thermistor sensor is mounted near the upper
bearing to prevent the pump from overheating. The
thermistor sensor, the motor stator windings and
the earth are connected to a Turbo-V controller
through a 6 pin socket on the side of the pump.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01 µm.
The pump can operate in any position and can be
supported on the high vacuum flange or on its
base. The connection of the forevacuum on the
side of the pump is a KF 25 NW flange.
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TECHNICAL INFORMATION
87-900-882-01(B)