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Figure 34
Insertion Procedure
1.
TV 401/301 MS User Manual / 87-901-013-01 (B)
TV 401/301 MS flange insertion/extraction flange. Insertion
smooth holes (6, RED CIRCLES @ 60°), extraction M6 threaded
holes (3, BLUE RHOMBS @ 120°).
Insert the pump into the chamber carefully and without tilting it.
Align the 6 insertion smooth holes of the pump flange with the 6
threaded holes in the chamber flange (Fig. 35), in order to obtain
the desired foreline orientation.
Technical Information
TV 401/301 MS Insertion and Extraction
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