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The turbopump can be installed in any position.
Fix the turbopump in a stable position connecting the inlet flange
of the turbopump to a fixed counter-flange capable of withstanding
a torque of 200 Nm around its axis, or use the optional base fixing
kit
NO!
!
WARNING!
To avoid injury, never put fingers or any objects whatsoever
in the inlet port of the turbopump. The use of the protective
screen is strongly advised (optional extra). If a vibration
damper or flexible metallic bellows are used on the inlet port,
make sure that the pump is fixed to the base.
The turbopump with ISO inlet flange must be fixed to the vacuum
chamber by means of clamps or claws. The following table shows,
for each flange and fixing device, the necessary number of clamps
or claws and the relevant fixing torque.
FLANGE
FIXING
DEVICE
ISO 63
M10 clamps
M8 claws
The turbopump with ConFlat inlet flange must be fixed to the vac-
uum chamber by means of the appropriate Varian hardware. See
the appendix "Technical Information" for a detailed description.
To fix the pump by means of its base, it is necessary to use three
M4 screws fixed to the foreseen holes of the pump base. The
used screws must have a minimum strength point of 500 N/mm
and must be fixed with a torque of 0,9 Nm.
For installation of optional accessories, see "Technical Informa-
tion".
USE
All the instructions for the correct use of the turbopump are con-
tained in the control unit manual.
Read the manual carefully before using the pump.
In order to achieve a better (lower) base pressure, the pump cas-
ing may be heated using the optional heater. While heating the
pump, the temperature of its inlet flange must not exceed 120 °C.
Always use the water cooling system during the heating opera-
tions.
N.
FIXING TORQUE
4
22 Nm
4
11 Nm
2
24
INSTRUCTIONS FOR USE
!
WARNING!
Do not touch the turbopump or any of its accessories during the
heating process. The high temperatures may cause burns.
!
Use air or inert gas free from dust or particles for venting the
pump. The pressure at the vent port must be less than 2 bar.
!
Avoid impacts, oscillations or harsh movements of the pump when
in operation. The bearings may become damaged.
!
For pumping aggressive gases, use the specially desgined ver-
sions of the Turbo - V 70LP pump. These pumps are fitted with a
special port through which a flow of inert gas must be passed
between 0,4 and 1 mbar l/s.
MAINTENANCE
The Turbo-V70LP series pump does not require any mainte-
nance. Any work performed on the pump must be carried out by
authorized personnel.
!
WARNING!
Before carrying out any work on the turbopump, disconnect it from
the supply, vent the pump by opening the appropriate valve, wait
until the rotor has stopped turning and wait until the surface tem-
perature of the pump falls below 50 °C.
In the case of breakdown, contact your local Varian service center
who can supply a reconditioned pump to replace that broken
down.
NOTE
Before returning the pump to the constructor for repairs, or re-
placement with a reconditioned unit, the "Health and Safety"
sheet attached to this instruction manual must be filled-in and
sent to the local sales office. A copy of the sheet must be in-
serted in the pump package before shipping.
If a pump is to be scrapped, it must be disposed of in accordance
with the specific national standards.
CAUTION
CAUTION
CAUTION
87-900-862-01(E)
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