Agilent Technologies TPS-compact Mode D'emploi page 11

TPS-compact User Manual / 87-901-010-01 (H)
Splošne informacije 227
Shranjevanje 230
Priprava za montažo 231
Montaža 232
Uporaba 234
Vzdrževanje 237
Odlaganje opadkov 238
Instructions for Use 239
Safety Guideline for Turbomolecular Pumps 240
General Information 241
Storage 244
Preparation for Installation 245
Installation 246
Use 248
Maintenance 251
Disposal 252
Technical Information 253
Description of the TPS-Compact 255
Technical Specification 261
TPS-Compact Outline
ASDF - Adaptive Scroll Driving Firmware 272
Interconnections
263
274
Contents
11/314