Technical Information; Description Of The Turbopump - Varian Turbo-V 6000 Notice D'emploi

DESCRIPTION OF THE TURBOPUMP

The Turbo-V6000 pump is available in two models
which differ only in the high vacuum flange:
− Model 969-9081 with ISO 500 high vacuum
flange
− Model 969-9082 with 20î internal diameter
Wheeler high vacuum flange
Model 969-9081
Model 969-9082
The Turbo-V6000 pump consists of a medium fre-
quency motor driving a turbine fitted with 12 bladed
stages. The turbine rotates in an anticlockwise direc-
tion when viewed from the high vacuum flange end.
The turbine is made of high-strength, light alumin-
ium alloy. The first 3 high vacuum stages have
blade angles of 40°, the subsequent four stages
have blade angles of 30°, and the lower stages
have blade angles of 20°.
The turbine rotor is supported by high precision
ball bearings oil lubricated: the upper one is a
double ceramic ball bearing, the lower one is a
double stainless steel ball bearing.
The static blades of the stator are made of alumin-
ium. These are supported and accurately posi-
tioned by spacer rings.
During normal operation, the motor is fed with a
voltage of 100 Vac three-phase at 233 Hz. To re-
duce losses during start-up to a minimum, the fre-
quency increases according to a ramp with a
higher initial voltage/frequency ratio. The motor
stator windings and the earth are connected to a
Turbo-V controller through a 7 pin socket on the
bottom side of the pump.
A water jacket surrounds the pump stator and is
used to cool the lubrication oil and the motor,
which operates in the forevacuum region of the
pump. Cooling water is connected to the pump via
two riffled nozzles on the cooling jacket.
Temperature sensors are located near the top and
the bottom bearings and the values are displayed
on the controller upon selection. Another tempera-
ture sensors is located between the motor and the
body and switches off the pump if the temperature
exceeds 65 hC.
A photodetector located on the forevacuum region
allows to measure the rotational speed of the
pump and its value is displayed on the controller
upon selection.
The oil is centrifugally pumped from the conical
nose of the shaft into the pump and is ejected
above the upper and lower bearings. As it falls it
lubricates and cools the bearings, finally draining
back to the transparent oil sump where any par-
ticulates are filtered by the small metering hole in
the sump. An oil level sensor is located into the oil
sump to monitor the oil level and if it decreases
below the minimum level the pump is stopped
automatically.
Temperature sensors, rotational speed photode-
tector and oil level sensor are wired to a 14 pins
socket located on the bottom side of the pump.
The pump is balanced after assembly with a re-
sidual vibration amplitude less than 0.05 µm.
The pump must be mounted vertically, with a
maximum allowable slope of 10h. It can be sus-
pended by inlet flange or rest upon its support
legs. The connection of the forevacuum on the
side of the pump is an ISO 100 flange.
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TECHNICAL INFORMATION

87-900-838-01(B)