Brooks Instrument CMC Serie Manuel D'installation Et D'utilisation page 9

Operation
CMC Series
Performance
Full Scale Ranges
Accuracy
Resolution
Temp. Effect on Zero
Temp. Effect on Span
Response Time
Operating Temperature
Compensated Temperature
Mechanical
Exposed Materials
Over-Pressure Limit
Weight
Electrical
Input Power
Output Signal
Power Consumption
Electrical Connectors
Electromagnetic Compatibility
RoHs
Notes:
1. RSS-Including hysterisis, linearity and non-repeatability.
6
Type A = 0.25% of reading; Type B = 0.5% of reading
1
2
2
Fully CE
Installation and Operation Manual
10, 20 50, 100, 500 and 1000 Torr
limited by output noise (≤0.0006% F.S.)
0.005% F.S. / °C
0.027% F.S. / °C
20 msec
0 to 80°C
0 to 50°C
Inconel
®
45 psia
0.3 lbs. (137 grams)
+12 to 30 Vdc
0-10 Vdc (<10K Ω load)
<200 mW
15-pin D sub on 6" cable
9-pin D sub
5-pin terminal strip
to EMC Directive 89/336/EEC
Compliant
X-VAC-CMC-eng
Part Number: 541B153AAG
May, 2018