Pump Purging And Venting; Pump Used With Corrosive Gases; How To Purge The Turbo-V 2300 Twistorr Pump - Aglient Turbo-V 2300 TwisTorr Mode D'emploi

Pump Purging and Venting

The Turbo-V 2300 TwisTorr is equipped with an integrated purging
and venting valve device. Both valves are fed through a single gas
port, with 1/8 NPT thread or Swagelok connector.

Pump used with Corrosive Gases

To prevent damage to the bearings, an inert gas must flow into the
pump body around the upper bearing towards the forevacuum line.
This will keep the pressure in the bearings area higher than in the
foreline and will prevent pollution or powder from flowing back,
mainly into the bearings area.
Disrespect of these simple, basic rules may cause seriously damage the pump
CAUTION!
bearings and void pump warranty.

How to Purge the Turbo-V 2300 TwisTorr Pump

To supply the inert purge gas (e. g. nitrogen) to the pump through the
purge port, connect a gas purge line to the pump.
The purging device automatically provides about 20 sccm when fed
with 1 bar (14 psi) absolute (atmospheric pressure).
To prevent bearing damage, Agilent suggests a minimum purge gas flow rate of
CAUTION!
20 sccm (0.33 mbar l/s). This value can be exceeded, according to the process
requirements. Please contact Agilent for specific applications.
Turbo-V 2300 TwisTorr Pumps User Manual / 87-901-017-01
Technical Information

Pump Purging and Venting

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