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Use - Agilent Technologies Turbo-V 81-T Mode D'emploi

Pompe turbomoléculaire

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  • FR

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  • FRANÇAIS, page 37
16
Instructions for Use

Use

Use

All the instructions to correctly use the turbopump are contained in
the controller manual. Read carefully this manual before use the
pump. To obtain better limit pressures it is possible to heat the
pump.
While heating the vacuum chamber, the temperature of the inlet
flange must not exceed 120 °C for a ConFlat flange and 80 °C for a
ISO flange.
While heating always use the water cooling.
WARNING!
Never use the turbopump when the inlet flange is not connected to the
vacuum chamber. Do not touch the turbopump or any of its accessories
during the heating process. The high temperatures may cause burns.
Avoid impacts, oscillations or harsh movements of the pump when in operation.
CAUTION!
The bearings may become damaged. Use air or inert gas free from dust or
particles for venting the pump. The pressure at the vent port must be less than 2
bar (above atmospheric pressure). For pumping aggressive gases, these pumps
are fitted with a special port to allow a steady flow of inert gas (like Nitrogen or
Helium) for pump bearing protection (see the appendix "Technical Information").
WARNING!
When employing the pump for pumping toxic, flammable, or radioactive
gases, please follow the required procedures for each gas disposal. Do not
use the pump in presence of explosive gases.
190/228
Turbo-V 81-T User Manual / 87-900-984-01
(E)

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