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Technical Information
Typical Layout Diagram
With Standard Rack Controller
Figure 29
1
2
3
4
5
6
7
8
9
10 Fore-vacuum pump control relay
11 Connection for water cooling
12 Roughing line with valve (optional)
13 Turbopump
14 Flexible connection
224/237
Turbo-V standard rack controller
Vent valve
Vacuum pump shut-off valve (optional)
System vent valve (optional)
Vacuum chamber
Ionization gauge
Fore-vacuum pump connecting flange
Oil mist eliminator
Fore-vacuum pump with internal one-way valve
Turbo-V 81-M User Manual / 87-900-983-01 (F)
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